Design And Error Compensation Of Motion System For Dicing Saw

With the continuous development of IC packaging technology towards the direction of fine spacing and large size packaging,dicing saw has put forward higher requirements for the machining range,positioning accuracy and measuring accuracy of the cutter for its high-precision motion system.In order to ensure the high precision of the motion system,the motion system of the dicing saw with 12-inch worktable is selected and designed,and the precision control and error compensation are carried out to ensure the high precision of the motion system.It is of great significance for the quality and yield of integrated circuit to improve the machining range and to ensure the positioning and measuring accuracy of the cutting blade at the same time.Based on one dicing saw which our team produced,the positioning ability of each axis of the motion system and tool setting technology of it.The acquired innovative achievements are as follows.(1)The mechanism selection and design of the motion system of the dicing saw.According to the working principle of the motion system of the dicing saw,the technical index of the motion system is determined,including the motion function,the transmission mode and the precision requirement of each axis.The rotation mechanism and linear motion mechanism of the motion platform are selected and designed to ensure high stability for the servo control system to achieve high precision positioning.(2)The design of motion control system of the dicing saw.The control scheme of PMAC & IPC(programmable multi-axes controller & Industrial Personal Computer)is selected by technical index,and the motion algorithm is designed by analyzing the motion mode of equipment.By adjusting the PID &feedforward control parameters of the control system,the response of the system can be fast and the following error can be small.(3)Motion system error analysis and detection compensation.Firstly,the error model is established by error matrix method,the main error factors of the system are analyzed,and the scheme of error identification and error compensation is provided.In order to improve the positioning accuracy of the axis,the plane of the worktable is detected by the dial indicator,and the compensation between the axes is carried out by the motion control system under the condition that the error is small and stable.Finally,the accuracy and stability of the motion system are tested according to the testing experiment,and the machining test of the whole motion system is carried out to verify the accuracy and stability of the motion system.In this paper,the motion system of the dicing saw is taken as the research object.The selection design from hardware to software ensures the initial accuracy and stability of the system,and analyzes the causes of the errors in the high precision motion positioning of the dicing saw.Through certain measures to reduce the error,the high precision and stability of the motion system are tested experimentally,which ensures the high precision and high stability,and provides the idea for the design and precision control of the motion system of it.