| The planar ultrasonic motor is a new concept electromechanical power conversion component that converts electrical energy into planar motion output.It converts electrical energy into mechanical energy based on the inverse piezoelectric effect,and outputs planar motion through the friction coupling process.It is not subject to electromagnetic interference,and has a wide range of applications in many fields such as IC manufacturing,precision processing,and biomedical engineering.Adapted to the needs of a wide range of high-precision surface movement applications,the paper plane ultrasonic motor design techniques are studied,the main contribution is:In recent years the development of ultrasonic motor technology is introduced,the research status of ultrasonic motor is carded,especially planar ultrasonic motor,the characteristics and engineering applications of ultrasonic motors are outlined,the development of planar ultrasonic motor technology is prospected,The trend of the developing ultrasonic motor technology has also made some predictions.It selects comb tooth in-frame transverse bending vibration,in-plane longitudinal bending vibration,and out-of-plane symmetric bending vibration as working modes,and the process and conditions of the stator driving foot forming a two-phase orthogonal traveling ellipse trajectory are analyzed.The mechanism of driving foot to move the mover in the direction of two degrees of freedom is explained,and the voltage polarization and power supply configuration mode of the stator are planed.The finite element model of electromechanical coupling analysis of a planar ultrasonic motor based on a frame comb-tooth stator is established,and based on the Lansos method,the vibration modes of the frame comb-tooth configuration in three-phase working modes are simulated.The frequency has natural close characteristics;the influence of the structural topology and the geometric scale of the stator on the working mode vibration mode and frequency is studied,the dynamic degeneration of the working mode and the consistency of the frequency are achieved,the size of stator ultrasonic transducer structure is optimized to be 29.8mm ×17.1mm × 6mm.The harmonic response analysis model of the motor is established,the amplitude and frequency characteristics and the frequency consistency of the working mode are simulated,the interference mode of the motor is sorted out,the separation of the interference mode is realized;the stator transient response analysis model is established,which working vibration of the stator and the two-phase elliptical working trajectory of the driving foot are simulated,The simulation results show that when a driving voltage of 250 V and a frequency of 50900 Hz is applied to the stator model,the driving foot edge is driven.The driving amplitudes of the driving feet in the directions of x,y,and z are all in the micrometer range,and they are respectively0.8μm,1.0μm,and 1.1μm,which are sufficient to meet the working requirements of the motor’s resonant drive,the operating characteristics of voltage,frequency and phase modulation of the driving foot is explored.The whole machine analysis model of the frame comb-shaped planar motor is established,and its pre-pressure application characteristics are studied,and the speed adjustment characteristics and mechanical output characteristics of the motor are obtained.when a driving voltage of 250 V and 50900 Hz is applied to the motor model,the movement speed of the stator approaches 42mm/s can be obtained.The motor has a potential application space in high-precision planar motion drive. |
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