Research On The Ultrasonic Planar Motor Driven By Bending Vibration Modes Of A Cruciform Stator

The planer ultrasonic motor is a special kind of motor with multiple degrees of freedom,compared to the traditional plane driving mechanism composed of several motor,it has the high dynamic precision,high power density,quick response,compact structure,high electromagnetic compatibility,low noise,power self-locking and so on.This paper focus on the research of cruciform type planer ultrasonic motor,complete the following work:At first,the development history of ultrasonic motor at home and abroad is summarized,the present situation of the application and the future development trend are pointed out,and the theory of ultrasonic motor is analyzed in detail;Second,the cruciform structure of the ultrasonic motor stator is introduced witch has two degree of freedom.This stator can form two direction of drive by combining an out-plane bending vibration and two in-plane bending vibration.Through analyzing the vibration mode and strain of stator,the optimal model is designed which work in30127 Hz with size of 60mm×60mm×7.8mm;Then,the FEM model of the stator is made to researching the influence between the electrical signal and response of the drive end.A semi-major axis and short half shaft are respectively 1.6?m and 1.2?m elliptical orbit can be made by the drive end under the stimulus of 250V;Finally,analyzing dynamic output characteristics of motor through the contact model of ultrasonic motor,this motor can produce a motion with 50mm/s reference speed in any one degree of freedom in the excitation voltage 250 V and the pre-tightening force of 100 N.This motor also has good ability in modulating speed and steering operation in 30127±150Hz range of frequency,and can generate planar motion.