Micro-fabrication of a Mach-Zehnder interferometer combining laser direct writing and fountain pen micropatterning for chemical/biological sensing applications

This research lays the foundation of a highly simplified maskless micro-fabrication technique which involves incorporation of laser direct writing technique combined with fountain pen based micro-patterning method to fabricate polymer-based Mach-Zehnder interferometer sensor arrays' prototype for chemical/biological sensing applications. The research provides methodology that focuses on maskless technology, allowing the definition and modification of geometric patterns through the programming of computer software, in contrast to the conventional mask-based photolithographic approach, in which a photomask must be produced before the device is fabricated.This research lays the foundation of a highly simplified maskless micro-fabrication technique which involves incorporation of laser direct writing technique combined with fountain pen based micro-patterning method to fabricate polymer-based Mach-Zehnder interferometer sensor arrays' prototype for chemical/biological sensing applications. The research provides methodology that focuses on maskless technology, allowing the definition and modification of geometric patterns through the programming of computer software, in contrast to the conventional mask-based photolithographic approach, in which a photomask must be produced before the device is fabricated.