Study On Fabrication Technology Of Micro Temperature Controller By Laser Micro Cladding

Comparing with the common temperature controller such as electric cooker, the micro temperature controller, which consists of micro heater and micro thermosensor, have many advantages such as small size,high precision,lower power usage,rapid temperature ascending. It can be used in many fields widely. At present, the temperature controller are mainly manufactured by thin film methods, which contains etching,doping,photolithography,sputtering and so on, and with high cost. It has a big potential to developing the process to manufacture micro heater and micro thermosensor.In this paper, two simple methods with low cost has been presented to manufacture micro heater and micro thermosensor : one is laser micro cladding and another is micropen direct writing technology. The processes of two methods were studied in this paper in detail and the micro temperature controller was fabricated successfully. The mechanisms of the electric and calorifacient of micro heater were studied by SEM and heat analysisThe performances of the micro temperature controller were tested, which contains the TCR efficient, linear tolerance,and the effect of electrify time,voltage,space position on the temperature. The results showed that, the resistance of thermosensor was linear to the temperature approximately, and the linear tolerance was less than 1.0. Moreover, the temperature of micro heater increased with the increasing of electricity time and electricity voltage, and will keep unchangeable. Whereas the temperature decreased with the increasing of the distance of sensors and micro heater.Based on above works, the peripheral circuit was designed and realized according the temperature controller array's characteristics, and succeeded in temperature display and control. Finally, the temperature control system was integrated and manufactured.