Research On Design And Molding Technology Of Anti-reflection Microstructure On Monocrystalline Silicon Surface

Functional microstructures refer to the fabrication of nano-to micron-scale microstructures on the surface of parts to achieve specific functions such as hydrophobic,drag reduction,optical anti-reflection,and improve the performance of parts or devices.Functional micro-and nano-structures exist widely in nature,such as lotus leaf surface micro-and nano-structures with good hydrophobic properties,can achieve self-cleaning lotus leaf surface,shark skin surface micro-and nano-structures have good drag reduction effect,so that sharks in water activities more energy-saving.In recent years,human beings have continuously recognized and learned the functional microstructures of biological surfaces in nature,and studied the design and preparation of various functional microstructures on the surface of parts in order to regulate their optical,lubrication and friction characteristics and improve the performance of parts and devices.This field is one of the hotspots of current academic research.In order to improve the surface anti-reflection properties of silicon semiconductor materials,the surface optical anti-reflection properties of different functional microstructures were studied.The optimum design of surface functional microstructures of single crystal silicon and its preparation process were explored.The anti-reflection properties of the prepared samples were evaluated.Firstly,based on a large number of investigations,the application requirements of functional microstructiires in solar cells,photoelectric detection,self-cleaning and other fields are analyzed,and the main preparation methods of functional microstructures on single crystal silicon surface are summarized.On this basis,the main problems in current research are analyzed.Secondly,based on the finite difference time domain(FDTD)method,the finite element simulation of the optical properties of functional microstructures on the surface of monoctystalline silicon is carried out,and the mechanism of reducing light reflection by functional microstructures on the surface of monocrystalline silicon is revealed.For pyramids,cones and other microstructures,the reflectivity characteristics of microstructures under different sizes,duty cycles and incident wavelengths are simulated and analyzed,and the reflectivity characteristics of microstructures under different shapes and angles of incidence are compared and analyzed,so that the optimal design of functional microstructures with low reflectivity is realized.Thirdly,ultra-precision turning technology for functional micro-structure of single crystal silicon surface was studied.For micro-scale V-groove structure,pyramid and other micro-structures(height 1-10 micron,width 10-50 micron),single point diamond ultra-precision turning(SPDT)was used to achieve the processing and forming.The experiments of single crystal silicon surface cutting under different technological parameters(tool rake angle,spindle speed,back feed,etc.)were carried out,and the optimized combination of cutting parameters was obtained.The parameters of micro-structure surface morphology and optical reflectance were detected and analyzed respectively.The validity of the finite element simulation analysis method and the effectiveness of the simulation results are verified by comparing the experimental results with the simulation results.Finally,the influence of micro-nano dual structure on the optical properties of single crystal silicon surface was studied experimentally.On the micro-nano scale micro-structure surface,nano-structure was prepared by acid etching method.The surface morphology and optical reflectivity of micro-nano dual structure surface were measured respectively.The experimental results show that micro-nano dual structure can help to further improve the licro-structure surface.Reflectivity.The research work in this paper provides a feasible solution for the design and fabrication of functional microstructures on the surface of monocrystalline silicon,which has important reference significance for the development of solar cell technology and photodetector technology.