Research On Driving Characteristics And Active Control Strategy Of Photoelectric-electrostatic Composite Flexible Beam

In order to solve the problem of driving efficiency in the field of micro-drive,frequent electromagnetic interference frequently occurs in piezoelectric driving,electromagnetic driving,electrothermal driving and electrostatic driving.Based on the abnormal photovoltaic effect induced by ultraviolet light in PLZT ceramics,a new driving method of photoelectrostatic composite driving is proposed,which not only inherits the photoelectric non-contact but also directly drives the source compared to PLZT ceramics,avoiding"hysteresis effect "and improving the response speed.The reasearch provide the theoretical basis for further research on actuator in micro-drive field.Firstly,the multi-physics coupling effect of PLZT ceramics was systematically introduced.From the engineering application point of view,a simplified mathematical model of photovoltaic voltage of PLZT ceramics was proposed.The influence of light voltage on the light intensity,illumination area and electrode materials and other factors are studied theoretically,and the influence of the law curve is given.And the relationship between the external bias field and PLZT ceramic photovoltaic voltage is further clarified.Based on the research of the influence factors of photovoltaic voltage,PLZT ceramic-driven PVDF-laminated flexible cantilever beams and PLZT-driven electro-optic flexible cantilever are proposed.The driving mechanism of photovoltaic and photovoltaic electro-static drive is introduced.Different compound drives mathematical model is established.Theoretical analysis and experimental verification of influential factors such as the size of PVDF,the size of the electrostatic region and the intensity of the light on the driving characteristics of the composite were carried out.The results show that with the increase of PVDF length,The deflection of the first increases,then decreases;with PVDF thickness increases,the optoelectronic piezoelectric flexible cantilever deflection increases.In the electro-optical drive,as the light intensity increases and the area of the electro-optic electrostatic field increases,the deflection of the electro-static flexible cantilever beam also increases.When the electrostatic field covers the entire MEMS beam,a photoelectrostatic composite driving mathematical model of the corresponding cantilever beam and the fixed beam is established respectively for the MEMS level electro-static driven actuator.In view of the size of the MEMS beam in the mathematical model,the driving voltage And other factors to carry out the numerical analysis of influencing factors,gives the theoretical curve of the changing law of influencing factors.When the length of the electrostatic field is smaller than that of the MEMS beam,a mathematical model of the location distribution of the photoelectrostatic field is established.Based on the numerical analysis,the optimal location theory of the photoelectrostatic field is given.The research on the active control of the electro-optic flexible cantilever was introduced.The basic principle of active control was introduced.The mathematical model of the closed-loop control was established.The algorithm simulation analysis and research was carried out by Matlab.The active control experiment platform was set up and the active control experiment was carried out.The experimental results and simulation results verify that the active control strategy is effective.