WO₃ Electrochromic Thin Film Preparation And Device Application Research

Electrochromic thin films and devices have the effect of saving energy,and can effectively reduce the increasing energy crisis in the world,which is now attracting the attention of researchers.In the research of this paper,a DC reactive magnetron sputtering method was used to sputter WO₃ thin films with different oxygen partial pressures on ITO glass and conduct detailed electrochromic analysis tests on the WO₃ thin films.At the same time,this article sputtered Ta O_x films of different oxygen partial pressures and different pressures on the basis of WO₃ films,analyzed the effects of Ta O_x films on WO₃ films under different preparation conditions,and prepared all-solid-state electrochromism containing Ta O_x films The device（ECD2）and the all-solid electrochromic device（ECD1）without Ta O_x film were compared and analyzed.Finally,this paper prepares the Ta O_x:H electrolyte layer by itself,and analyzes the effect of the Ta O_x:H electrolyte layer on the all-solid-state electrochromic device under different preparation conditions.Research indicates:1)Under the condition of 30%oxygen partial pressure,a WO₃ film with excellent electrochromic comprehensive performance is obtained,in which the light modulation amplitude reaches more than 90%,the coloring/fading response time is 10 s,and the coloring efficiency is 26.37 cm²/C.2)The Ta O_x film prepared under the conditions of 15%oxygen partial pressure and 1.3Pa environment has a better effect on improving the electrochromic performance of the WO₃ film.The coloring response time of the film is only 18 s,and the cycle stability is superior,and The coloring efficiency is stable at 33 cm²/C.3)The coloring response time of ECD1 and ECD2 is 6 s,and the coloring efficiency of ECD2 is stable in the range of 135 cm²/C,and the instantaneous current is also smaller than that of ECD1.In the kinetic test of the spectrum,the coloring degree of the ECD2 cycle stability coloring state showed almost no fluctuation and showed excellent cycle stability.4)The devices with the hydrogen partial pressure and the preparation pressure of20%and 2 Pa prepared in the Ta O_x:H layer have excellent electrochromic performance.The coloring/fading response time of the device is only 5 s/3 s,and the coloring efficiency is 129.51 cm²/C,the light modulation amplitude is 77%.