| With the continuous development of micro-machining technology,various electronic products,especially micro-sensor parts,are rapidly developing toward the miniaturization and functional complexity of the structure.For this micro-structure,the existing test is tested and evaluated.The method is limited by the problems of low precision,parameter coupling and single test parameters,and it is urgent to integrate an integrated high-precision test system.In response to these problems,the thesis analyzes the vibration theory of piezoelectric/silicon microbeams,the study of vibration performance test methods,the design of integrated test systems,and the experimental evaluation,supported by the “high-sensitivity magnetic sensor technology” project of military weapons and equipment.In this thesis,the piezoelectric/silicon microbeam resonance performance integrated test system is studied.The main work and achievements are as follows:(1)Based on the theoretical basis of piezoelectric vibration and damped vibration and the existing vibration performance test methods of different parameters,an integrated piezoelectric/silicon microbeam resonance performance test method is established,which provides a solution to overcome the parameter coupling problem occurring during the test.Based on the basic theory of piezoelectric/silicon microbeam vibration,the piezoelectric vibration and damping vibration characteristics of piezoelectric/silicon microbeams and the influencing factors in the magnetic sensor system are analyzed.It is found that the influence of thermoelastic damping/air damping on the vibration system is better.Small,the influence on the quality factor of piezoelectric/silicon microbeams is only 104,which is not the main interference factor of the vibration system.The main factor affecting the quality factor of the vibration system is the support damping;the existing vibration performance parameter test methods are compared and analyzed.In the study,two common test methods are selected for each measurement parameter for analysis and comparison.Then,two integrated test theory methods are proposed for multi-parameter measurement problems,among which,the key parameters are solved in the test system test process.The research proposes a reasonable optimization scheme.Both of these integrated design methods can greatly reduce the test steps,reduce the error caused by human factors during the test,and effectively avoid the generation of parameter coupling phenomenon.Finally,the comparative analysis of the proposed Two integrated test methods based on different principles,combined with actual Based on the conditions and performance requirements,a method is proposed as the design basis for the design of piezoelectric/silicon microbeam resonance performance integrated test system.(2)An integrated test system based on piezoelectric/silicon microbeam resonance performance was designed.A piezoelectric/silicon microbeam resonance performance test system was constructed based on the integrated test method based on signal source control.Based on the basic principle of piezoelectric vibration and damped vibration,the signal source,piezoelectric/silicon microbeam and control module are integrated and integrated,and the scheme of piezoelectric/silicon microbeam resonance performance integrated test system design is perfected;based on error theory basis Design the signal acquisition module including charge amplifier and filtering function to improve the data acquisition accuracy of the closed-loop control system;use DSP to control the whole system,and implement high-precision testing based on orthogonal lock-in amplification and digital PI control technology.And control,the vibration process of the piezoelectric/silicon microbeam is adjusted to a stable state through a closed-loop control system,and the detection voltage variation range is controlled in the micro-ampere level;the high-precision current is realized by the high-resolution DAC and the voltage-controlled constant current source technology.Control;use high-precision laser micro-displacement sensor to achieve high-precision amplitude measurement and high-speed data acquisition;based on the theoretical basis of serial communication,solve the problem of efficient transmission and communication between test instruments and equipment;through software modular design,system operation,The data operation and the result display are combined in the same user software.(3)A comprehensive piezoelectric/silicon microbeam resonance performance integrated test system was built to achieve accurate measurement of the amplitude,quality factor and resonant frequency of the piezoelectric/silicon microbeam vibration performance,and completed a series of test work.The basic functions of the piezoelectric/silicon microbeam hardware system in the magnetic sensor are verified.The effects of the resonance performance parameters,the detection voltage output characteristics of the control module and the environmental parameters are tested and analyzed.The test results show that the quality factor of piezoelectric/silicon microbeams is generally above 100,and can reach 1100 in specific cases;the amplitude value can be up to 10?m;the resonance frequency is around 8kHz,which is consistent with the design value;the detection voltage output is stable,the variation range is in the micro-ampere range,and the system is on the piezoelectric/silicon microbeam.The vibration control accuracy is high;the vibration state of the piezoelectric/silicon microbeam under different environmental conditions is monitored and analyzed by using the built-in integrated vibration test system to study the temperature change of the piezoelectric/silicon microbeam vibration in the external environment.The effect is found that the piezoelectric/silicon microbeam resonancefrequency increases simultaneously with the increase of temperature,showing a good positive correlation.The test system detects the voltage and its quality factor decreases,showing an inverse correlation. |
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