Design And Manufacture Of Low-loss High-rectangular Surface Acoustic Wave Filter

Because of its advantages of simple structure,few mask layers,easy miniaturization and low cost,SAWF is widely used in home TV,mobile communication,radio frequency filter and radar.The Internet of Things and 5G communication technologies urgently need highperformance surface acoustic wave filters with characteristics such as lower loss,highrectangular,and low frequency temperature coefficient.This paper conducts research on lowloss high-rectangular surface acoustic wave filters,designs and manufactures samples,and provides ideas for development and reference to practical design methods for surface acoustic wave filters in related research fields.It has corresponding research significance and actual value.This paper conducts research on the design and manufacture of low-loss high-rectangular surface acoustic wave filters.The main work includes the following parts:First,the basic theory and working principle of surface acoustic wave are studied,the important theoretical formulas of the interdigital transducer and the double-ended structure are deduced,the equivalent circuit model of the surface acoustic wave filter and its loss composition are studied,in order to select the device The structure,geometric parameters and subsequent design and simulation laid the foundation.Secondly,a low-loss high-rectangular surface acoustic wave filter is designed.The finite element analysis software COMSOL was used to establish the model and simulation,the modal characteristics and transient characteristics of the device were analyzed,and the propagation characteristics and transient characteristics of the Rayleigh surface acoustic wave were verified;based on the equivalent circuit model,the ADS software was used Device electrical characteristics analysis and S-parameter simulation results meet the design requirements of low loss and high rectangularity.Then,the manufacturing process of SAW filter was studied.The design method of the mask plate based on Tanner Tools and MATLAB is given,the technological process of the lowloss high-rectangular surface acoustic wave filter is designed,and the sample of the surface acoustic wave filter is processed.Finally,based on the produced SAW filter samples,the structural integrity was characterized by using a confocal microscope,which showed the rationality and feasibility of the designed process.Then use the network analyzer to test the S parameters of the packaged samples.The test results show that the designed structure and process flow meet the design requirements.