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Properties Of Nitrogen-doped Cuprous Oxide

Posted on:2020-11-27Degree:MasterType:Thesis
Country:ChinaCandidate:J J ZengFull Text:PDF
GTID:2428330599454498Subject:Physics
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Cuprous oxide?Cu2O?is a direct band gap semiconductor which has a forbidden band gap ofabout 2.0eV.It also has the advantages of high absorption coefficient,Earth-abundance,non-toxicity and stability,etc.It is suitable for photovoltaic devices and photocatalysis.Undoped Cu2O is a p-type semiconductor with relatively high electrical resistivity and doping is usually used to improve its carrier concentration and reduce resistivity.Nitrogen doping can effectively improve hole density and reduce the resistivity of Cu2O thin films.In the work about nitrogen-doped Cu2O,doping was realized by improving the flowrate of nitrogen and fixing the sputtering pressure and other parameters.In addition,there has been no report about the effect of annealing on the electrical and optical properties of nitrogen doped Cu2O.In this thesis,nitrogen doping was realized by varying the sputtering pressure and fixing other parameters,and the effect of annealing on the electrical and optical properties of Cu2O was studied.We find that lower sputtering pressure favors nitrogen incorporation into Cu2O and higher sputtering pressure does not;Nitrogen has 3 states in Cu2O,namely nitrogen atoms,?-N2?-N=N-?and?-N2?N?N?which are 2 types of molecules;Annealing under certain conditions have little effect on the electrical and optical properties of nitrogen-doped Cu2O;After annealing,nitrogen atoms disappear and?-N2 molecules partially turn into?-N2 molecules.This thesis has 5 chapters.In chapter 1,the basic principles of solar cells and Cu2O materials are introduced.In chapter 2,direct current sputtering deposition and the characterization methods are introduced.In chapter 3,we firstly prepared pure phase Cu2O thin films and pure Cu2O thin films were annealed in Ar or Ar and N2atmosphere.It is found that annealing Cu2O thin films in these two atmosphere environments does not change their composition,and nitrogen does not diffuse into the Cu2O thin films.Secondly,weprepared nitrogen-doped Cu2O by fixing other parameters but changing the sputtering pressure,and then studied the influence of different sputtering pressure on the preparation of nitrogen-doped Cu2O thin films.The experimental results show that lower sputtering pressure is beneficial to nitrogen doping,increasing the holes concentration and reducing the resistivity of the sample.In chapter 4,nitrogen-doped Cu2O thin films are annealed and the annealing was divide into two groups.The first group is to change the annealing time.The second group is to change the annealing temperature.The experimental results show that annealing at higher temperatures can result in a small amount of Cu in the films.After annealing,atomic nitrogen will disappear and?-N2?-N=N-?molecules will be partially transformed into?-N2?N?N?molecules.Annealing does not cause damage to the nitrogen-doped Cu2O films,nor does it have a significant impact on the optical and electrical properties of Cu2O films.The summary and innovation point are present in chapter 5.
Keywords/Search Tags:Cu2O thin film, DC magnetron sputtering, nitrogen doping, annealing, optical and electrical properties
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