Study Of 3D Diamond Solar Blind Detector Prepared By Metal-etching Catalytic Hydrogen Plasma Methods

Most of the ultraviolet detectors used in the world are traditional silicon-based materials UV detectors.Although the development of silicon-based detectors is relatively maturely,but they have disadvantages such as low UV/visible selectivity,low radiation hardness,and short working life.It can't work in the harsh environment of deep space exploration,missile plume detection,etc.Diamond can work normally in harsh environments compared with silicon,and diamond has a very wide forbidden band width(5.5eV),it can eliminate visible light interference and improve the performance of solar blind detectors.However,the performance of conventionally used diamond planar electrode structure detectors is limited by the structure of the electrodes,making the diamond advantages difficult to play.Aiming at this problem,we have carried out research on the preparation of 3D diamond solar blind detector by metal catalytic hydrogen plasma etching.In this paper,the catalytic etching of diamond in the hydrogen plasma atmosphere generated by MPCVD equipment is studied.A large number of experiments have been carried out to improve the surface roughness of the diamond after etching,and a feasible and efficient diamond etching is obtained.Compared with other methods of etching diamond,the method has the advantages of simple process,low cost and high safety.In the course of the experiment,SEM,LSCM,XPS and other characterization tools were used to characterize the material composition of the diamond surface after etching and the composition of the particles formed on the surface after etching.We carry out the physical image simulation of the etching process.The mechanism of plasma etching diamond is also discussed.The knowledge of crystallography is used to explain the phenomenon of different surface topography of diamond after etching.Then we used the metal-catalyzed hydrogen plasma etching process to fabricate a 3D diamond solar blind detector,and the control variables were used to fabricate a conventional planar electrode diamond detector.The performance of the two detectors was tested and the 3D electrode structure diamond detector was used.The gain mechanism is explained.It is believed that the introduction of the surface state during the etching of the diamond results in a decrease in the barrier height of the interface between the electrode metal and the diamond,and finally caused a gain in the ultraviolet light response.The test results show that the 3D detector has significantly better performance than the planar electrode detector,and its performance value is improved by one to three orders of magnitude compared to the planar electrode detector.