Accelerant Polishing Of CVD Diamond Flims Based On The Principle Of Catalyst

CVD diamond is the mainstream of future development of diamond materials, and its ultra-precision machining is one of the key technologies to expand the application of CVD diamond films. This paper presents an efficient method of diamond polishing- accelerant polishing of CVD diamond. This method based on the principle of diamond graphitization, which make full use of Fe, Ni, Co and other transition metals as catalysts for diamond, effective in reducing the activation energy of diamond graphitization, produce easy-to-ground graphite, then improve the processing efficiency by mechanical polishing, Carbon spread in metal and air oxidation.The main results and work in this paper as the following aspects:1. Introduce the idea of polishing based on the principle of diamond graphitization, and make full use of Fe, Ni and other transition metals as catalysts for diamond.2. Research a polishing system suitable for CVD diamond polishing and grinding, which have the features as compact frame, high processing efficiency and precision, and easy to use.3. By studies and experimental analysis of chemical thermodynamics and kinetics, it shows the catalytic role of CVD diamond by transition metal, and achieve the diamond graphitization at room temperature.4. Though the research of Orthogonal Experimental Analysis, it shows the control factors of accelerant polishing is proportional to processing quality of CVD diamond, whish polishing time is the biggest influencing factors, second is polishing the speed, and the load has little impact5. Experimental studies show that accelerant polishing is a highly efficient polishing method, under the same processing conditions, its processing quality is significantly better than the traditional mechanical polishing.