With the emergence of wireless communication bottlenecks,visible light communication has entered people's eyes,and LEDs are widely used in visible light communication because of their fast response,low power consumption,and fast response.GaN-based photonic structures are of great interest for integrated optoelectronic devices in the visible region due to their capabilities of emission,transmission,modulation and detection.InGaN/GaN multiple quantum well diodes exhibits broadband emission.Hence,the MQW-diode can respond in the short wavelength half of the emission spectrum when it works as a photodiode.In this paper,the spatial simultaneous light-emitting light-detecting functionality of multiple quantum wells are studied,and the GaN-based visible light communication chip on silicon substrate is successfully realized.The main work results are as follows:In this paper,we build an on-chip photonic integration system on a GaN-on-silicon platform,both emitter and detector can be produced on the same substrate using the same fabrication processes.Using silicon removal and back wafer etching techniques,the emitter,waveguide and detector are integrated on a suspend membrane,forming the on-chip visible light communication system.The visible light communication chip on the GaN-on-silicon platform includes two suspended InGaN/GaN multiple-quantum-well diodes(MQWDs),which are connected by suspended waveguides.When two MQWDs are fabricated as a transmitter and a receiver,respectively,an in-plane one-way visible light communication system is formed,and the transmission rate is up to 100 Mbps.When two MQWDs are used as the light source and the detector,simultaneously,an in-plane simultaneous full-duplex communication system is formed,and the transmission rate is up to 1 MHz;when one of the MQWDs is used as a transmitter and externally received by a commercial detector,an out-of-plane one-way visible light communication system is formed,and the transmission rate reaches 120 Mbps.Here,spatial simultaneous light-emitting light-detecting functionality,in which the detected light comes form an external light source,is experimentally demonstrated.A micro-transmittance setup is built to collimate the emitting light and to focus the light onto the MQW-diode.The MQWD detects the spatial signal size under different bias voltages,that is,with the light emission intensity increase.InGaN/GaN multiple quantum well diodes as optoelectronic devices,under this spatial light-detecting mode,they can fully realize full-duplex visible light communication,and can be widely used in automatically adjustable displays and photonic chips in the future. |