The Research On Digital Controland Detection Circuit Of The Piezoelectric Hemisphere Resonant Micro Gyroscope

Hemispherical resonator micro gyroscope is a new type of solid micro gyroscope which has been developed rapidly in recent years.Because of its high impact resistance,good stability,high accuracy,long service life,and unique ability to resist radiation,it has advantages and development space as the key components of the attitude stabilization control and inertial measurement unit in the space field.A piezoelectric hemispherical resonator micro gyroscope is proposed in this paper.The micro gyroscope is processed by the integrated casting forming process of PZT.It consists of a hemispherical resonator with electrodes attached to its surface and a supporting column.In principle,it uses degenerate modes of bulk acoustic wave,combined with piezoelectric effect,Coriolis effect theory and acoustic theory,so as to realize the function of angular velocity detection.The basic structure,working principle,simulation analysis,circuit frame design,analog control detection circuit design,digital control detection circuit exploration of the micro gyroscope is analyzed and explained respectively in this paper.In the simulation process,the working state of the micro gyroscope is simulated to evaluate its detection accuracy.In the design process of the circuit frame,the control detection scheme of the circuit is compared and selected.In the design process of analog control detection circuit,through the design and integration of the various parts of the circuit,the control detection circuit schematic and PCB diagram is designed,and the circuit board is made to carry out the relatedtest.In the inquiry process of digital control detection circuit,the related experiments were carried out with a force balance feedback control detection digital circuit system using digital method and the closed loop control method.