Assembly And Performance Of Carbon Nanotube Field Effect Transistor Based On Robot Operation In SEM

With the development of Moore's Law and nanotechnology,the smaller the size of the transistor,the performance of silicon-based materials as conductive grooves is almost exhausted.Based on the nano-operated robot system in the scanning electron microscope,the bottom-up manufacturing process can be realized,the area of the transistor will be reduced effectively,and more transistors can be accommodated on a unit area.This provides an effective research method for the manufacture,operation and assembly of two-dimensional structures and three-dimensional structural field-effect transistors.Carbon nanotubes have been widely concerned for their unique physical and chemical properties and are considered to be one of the materials that can effectively replace silicon based.Based on the research of two-dimensional planar carbon nanotube field effect transistor,the manufacture of the device is carried out on this basis.Based on the nano-operated robot system in scanning electron microscope,the assembly method is studied.Based on the assembled carbon nanotube field effect transistor,the test methods of electrical properties such as current-voltage characteristics,transfer characteristics,output characteristics,carrier mobility rate and current density are determined,and based on the nano-operated robot system,the experimental platform of electrical characteristic test is constructed,and the electrical performance results are tested.The main research contents of this paper are as follows:(1)Based on the existing theory and the study of two-dimensional carbon nanotube field effect transistor,the structural characteristics of the carbon nanotube FET field effect tube which need to be assembled in this subject are determined.What needs to be assembled in this experiment is a typical carbon nanotube field effect tube.As the back gate of the FET,the basal silicon is used to regulate the current in the carbon nano-pipe trench channel.The advantages of this kind of structural carbon nanotube field effect tube are analyzed from the angle of electronic ballistic transportation,surface phonon polarization and different material function functions.Finally,some micro-electrodes were prepared by MEMS manufacturing process.(2)A The Carbon nanotube field effect tube is assembled based on the nano-operated robot system in the scanning electron microscope.The assembly process involves a number of subdivision tasks,the carbon nanotubes are picked up,detected,position adjustment,transfer,the use of electron beam-induced deposition method to make the carbon nanotubes and metal electrode surface phase fixed.The corresponding operational policy design is carried out for these tasks.Based on these strategies,carbon nanotubes were successfully assembled into the surface of the microelectrode.At the same time,the kinematics mechanism of robot involved in the process of micro-nano operation is analyzed,and the principle of contact between carbon nanotubes and metal surfaces is studied.adhesion(3)Based on this typical structure of carbon nanotubes field effect tube,its channel material carbon nanotubes for performance testing and analysis.The method of electron beam irradiation fusion is proposed to realize the interconnection between carbon nanotubes,and it is found that the carbon nanotubes formed by welding have good mechanical properties.Then the Young's modulus of carbon nanotubes was determined by using AFM probe to compress carbon nanotubes.In the aspect of electrical characteristics,the formation mechanism of contact resistance produced by the contact between carbon nanotubes and metals is analyzed,and the electron beam induced deposition W(CO)6 is also proposed,which can obviously reduce the contact resistance between the two.Because of the complexity of the test circuit and the inability to directly complete the electrical properties of the FET under the scanning electron microscope,only the cooperative operation of the carbon nanotubes by the multi-Nano robot is completed in the scanning electron microscopy.It is then removed and the electrical properties of the carbon nanotube field effect transistor are tested using the four probe optical platform CASCADE MICROTECH M150 and the semiconductor analyzer KEITHLEY4200-SCS.