Research On Operation Platform With Multi-DOF Robotic Manipulators Based On Scanning Electron Microscopy

With the development of natural science and engineering technology,nano-technology has been widely used in aviation,aerospace,biology,medicine,national defense and other fields.For the three-dimensional operation and assembly of nano-devices,the single hand or both hands operation completed under the force microscope atom or scanning electron microscope.However,due to the limitation of the microscopic observation space,the precision and flexibility of the nano-robotic system are insufficient,the processing and assembling of the three-dimensional nano-devices is a great challenge to the field of nano-robot operation.The scanning electron microscope has the advantages of real time nano-precision observation,high clean,high vacuum environment and so on,which can effective ly improve the efficiency of fabrication of 3D nano devices.To achieve efficient assembly and operation strategy for 3D Interconnect and device assembly,based on the operating environment of the scanning electron microscope,this paper designs the multi-degree of freedom robot to realize the cooperative control of multi manipulator.Based on the SEM device,the multi-freedom robot platform is integrated in the vacuum cavity of SEM,according to the different requirements of the nano-operation.Optimization of the spatial layout of the multi DOF robot platform,SEM and the operation object are carried out.The purpose of observing the process of nano devices and nano operation is achieved.Through the design of the platform,the large stroke micron level accuracy of robots integrated with the small range and nano precision of robots achieve a leap in macro and micro scale.Based on the kinematics analysis of multi freedom robot in SEM,nano-manipulator kinematics is analyzed.The nano-manipulator of the 3D kinematic model is established.The position equation of robot hand is achieved,to provide theoretical support for the action of nano operation process.Macro moving platform can adjust the device in the SEM,and the device characteristics and parameters are measured in the SEM.The dates are provided to the nano-manipulator operation of the four sets with four degrees of freedom.Four sets of nano-manipulator can process the nano objects parallelly,and work with a single nano-object.They could finish the nano-device pickup,assembly and so on coordinately.In the integration and experimental analysis of multi robots,the pickup experiments of carbon nanotubes are carried out using four sets of robot operation module.The parallel and collaborative operation modes are analyzed.The assessment of the operation platform parameters is analyzed,such as accuracy,stability and so on.The carbon nanotubes picking efficiency and quality a re analyzed and contrasted,to support the experimental dates for process improvement and pickup operation platform.