The Research On Accelerometer Based On Graphene Resonator

Accelerometer plays an irreplaceable role in inertial navigation,guidance,attitude measurement,oil exploration and other applications,it will move in the direction of high precision and miniaturization in the future.Thus,the graphene material has the advantages of high Young 's modulus,large elastic deformation limit and small size.The accelerometer based on graphene material is expected to realize the high precision and miniaturization at the same time,having a good development prospect.To this end,the paper carried out the theory of graphene accelerometer research,mainly completed the following work:(1)Firstly,a graphene resonator based accelerometer is proposed,and its system structure and working mechanism are briefly introduced.(2)Secondly,by using the strain gradient theory and the Kirchhoff thin plate theory,the resonant frequency of the graphene film and the external force deformation formula are deduced.The influence of the resonant frequency and acceleration on the deformation is analyzed.(3)The effect of the graphene film size and the sensitive mass on the resonant characteristics was analyzed by finite element simulation.The increase in free edge length can quickly reduce the resonant frequency,while the increase in fixed side length will be a small increase in the resonant frequency.Besides,when the sensitive mass position and rectangular center,the graphene film has the best resonance effect.(4)The sensitive range of the graphene resonator under external load is studied.It is concluded that there are two boundary points when the graphene resonators are sensitive to the external load: If the load is too low,the resonator can not sense the load.If the load is too high,it will break the elastic limit of the graphene material.(5)Finally,the sensitivity of micrometer graphene resonators to acceleration under different applied loads is analyzed.The results show that the sensitivity of the graphene resonator to the acceleration is low,only 102 G,which is mainly due to the good rigidity of the graphene and the large elastic modulus.When the two-dimensional material with lower elastic modulus is adopted,the initial sensitive load can be reduced effectively,and the resonant frequency of the resonator can be reduced.The resonant frequency is limited to a small range,which improves the detection accuracy of the resonant frequency,indirectly improving the sensitivity of the acceleration accuracy.