Simulation And Process Design Of Graphene Nano-Electromechanical Resonator

Graphene is a novel carbonaceous material with two dimensional honeycombs likestructure formed by a single layer of carbon atoms. Form the aspect of mechanicalproperties, the enormous stiffness and low density make graphene an ideal material fornano-electro-mechanical systems (NEMS) devices. As a typical NEMS device, NEMSresonator has been widely used in the area of sensors and communications because ofits high sensitivity and low power consumption features. In this paper, characteristicsanalysis and preparation process of graphene nano electromechanical resonator havebeen studied. We have completed the following work:The definition of NEMS and the research progress of NEMS resonator at home andabroad are given firstly. NEMS resonator model has been built based on the continuumtheory, and the model was numerical solved. Base on this, dynamic characteristics ofNEMS resonator were studied.Then, characteristics of graphene was been introduced, and the physical model ofsignal graphene layer was also given. The molecular dynamics method was used toanalyze the relaxation properties, the loading properties and the natural frequency ofgraphene nano-belts.Finally, a low cost and scalable fabrication technique of graphene resonant beamswas designed in this paper which was based on the chemical vapor deposition (CVD)method and MEMS preparation process.Through the studies above, we hope to provide theoretical and experimentalfoundations for design, preparation and study of graphene resonator.