Study On The Control System Of Large Area Structured Processing By Femtosecond Laser Two-photon Polymerization

Micro-nano-precision machining technology has been used in aerospace,tissue engineering,biomedical,micro-nano electromechanical systems,micro-flow control devices,micro-nano optical devices,bio-chip,new materials and new energy and many other areas.Two-dimensional photon polymerization(TPP)micro-nano processing technology can prepare micro-nano-dimensional three-dimensional structure,It is one of the hot spots of today's advanced manufacturing technology in the ultra-precision machining.As the complex three-dimensional micro-nano structure has a huge industry demand,sothe accuracy precision of the micro-nano structuresand other key technical indicators of the requirements are more and moreharsh.Therefore,the study of femtosecond laser two-photon polymerization micro-nano processing system is an urgent problem to be solved.At present,the processing system in China is mostly in the experimental research stage.The processing precision,processing speed and processing capacity of the workpiece are great restrictions,yet there is no introduction of forming processing equipment system.On this basis,the laboratory independently developed a set of femtosecond laser two-photon polymerization large area rapid structure of the processing system,effectively improving the quality and effect of femtosecond laser micro-nano processing,after provides a guarantee for the femtosecond laser two-photon polymerization technical research.The main achievements of this paper are as follows:(1)The laboratory independently developed a femtosecond laser two-photon polymerization large area fast structured processing system,including laser optical system,macro-micro positioning system,two-dimensional X-Y galvanometer system,laser shutter and real-time monitoring system.(2)Based on the Aerotech A3200 system,the linkage control of the femtosecond laser two-photon polymerization large-scale fast structured processing system is realized through the virtual instrument platform LabVIEW,Which can greatly enhance the efficiency of processing to ensure the processing accuracy,andat the same time the processing system has the ability to process complex three-dimensional structure(3)Based on the macro-micro-positioning system in the processing system,the dynamic model is established.Based on the sliding mode variable structure control algorithm,the control law and the controller are designed for the macro-micro positioning system.Sliding mode control is carried out by sliding mode controller to improve the machining precision.Atthe same time,Simulink module in Matlab is used to simulate and verify the effectiveness of the controller,and the experimental verification is carried out after.(4)Using the processing system to carry out multiple experiments,the processing capacity of the system is verified.Because of the realization of the system as a whole linkage control and macro-micro positioning system after sliding mode control,the processing effect is obviously improved and improved.