Research And Application Of Ultra-precise Constant Temperature Bathing Technology

Many precision devices such as projection lithography machines have strict requirements on their working environment.This paper designed a microenvironment system that includes a thermostatic chamber and air bath unit to provide good working conditions for these equipment.The main research work and conclusions are as follows:We proposed two air supply forms according to the different requirements of this masking platform and workpiece stage of the detection platform.Due to its compact structure and requirements for stabilizing the air curtain in the workpiece stage area,a novel combined air bath unit model with a flow distribution plate,a filter cloth and a uniform fluid channel is proposed.The numerical simulation method was used to simulate the factors that affected the uniform flow distribution of the flow distribution plate,including the ratio of the length to height of the distribution chamber,the area ratio of the distribution chamber to the distribution plate,and the number of slots,and the influence of various factors on the results was obtained Then the above factors were subjected to orthogonal test analysis and came to conclusion that the area ratio of the flow distribution chamber to the distribution plate was the most important factor affecting the uniformity of the outlet flow.We obtained the physical model parameters and porous media parameters of the filter cloth for numerical simulation.And in order to reduce the difficulty of manufacture,the honeycomb plate was used to replace the porous plate to form the uniform fluid channel.The flow distribution plate simulates the overall air bath unit and uses the exit velocity uniformity as the evaluation index to obtain the honeycomb plate parameters applicable to the device.The prototype was built and tested.The uniformity of the outlet of the workbench air bath unit reached 8.8%,and the temperature stability of the core area reached an accuracy of 22±0.1°C.Microenvironmental systems have been successfully applied to lithography inspection platforms.