Research And Improvement On The Clean Air Quality On The 12-inch Integrated Circuit Production Line

This thesis introduces the huge demand for integrated circuit chips in China,and analyzes the necessity and importance of air quality control in a 12-inch integrated circuit production line.The cleanliness control method of general purification plant is introduced.Several kinds of AMHS(Automated Material Handling System)in IC production line are introduced.The characteristics of AMHS in automatic 12-inch production line and the difficulties in controlling environment particles and AMC(Airborne Molecular Contamination)are analyzed.In this paper,the variation of atmospheric particulate concentration and AMC concentration in Shanghai in recent years has been studied,and some typical laws have been obtained,and the correlation between the external atmosphere and the air quality of the clean room has been found.In particle research,the serious influence of mask particles on process quality and production efficiency is explained.A series of experiments were carried out to find out the positive correlation between the particle concentration in the clean room environment and the occurrence rate of the mask particles.The key points were the particle concentration in the space above the mask platform and the corresponding occurrence pathway was mainly particle deposition.The effective conclusion is drawn and the corresponding disposal system is established,which effectively reduces the occurrence of mask particles and reduces the occurrence rate by more than 30%.The practical engineering problem is solved.In the aspect of AMC,based on the research conclusion of the variation law of AMC concentration in atmospheric environment,the method of AMC concentration control in clean room was studied,and the AMC control model with cost advantage was put forward and applied to the production line,and improved the control ability of AMC.The haze defects of mask in 12-inch IC production line are introduced.The relationship between AMC and haze defects of mask is explained.This paper introduces the influence of TVOC(Total Volatile Organic Compound)on the key process.Through the research and summary,we have obtained the way and conclusion which can effectively react and solve the problem of TVOC concentration jump.We establish the investigation and disposal model of TVOC concentration sudden jump,and establish the checklist aiming at the outside of the factory and the production line of the factory,and effectively apply it to the actual work of the production line,analyze and study a successful case of abnormal disposal.