Experimental Study On The Preparation Of Complex Silica Of The Integrated Circuit CCL By Mineral Raw Materials

With the rapid development of modern electronic products,integrated circuit has become the basic and strategic industry in support of social development.The CCL is carrier of the integrated circuit in the main,serving as a base material in the integrated circuit industry.In order to reducing the cost of materials,improving its mechanical properties,heat resistance,dispersion,and electrical properties,an inorganic filler is usually added in the CCL,such as silicon powder,talc,aluminum hydroxide.Due to the silica powder,its excellent high insulation,and high stability,is widely used in CCL,which has become the main inorganic filler in CCL.Silica is generally made of machined from solid quartz powder,the Mohs hardness of 7 and quartz hardness,melting point 1750?.Add Silica CCL has excellent performance,but its own high hardness and high melting point has been the industrial production of technical problems,it is good to prepare a composite microsilica to reduce hardness,industrial production drill bit wear rate,and improve production efficiency is very important.This paper uses XRD?XRF to analyze about the selected mineral raw materials.The result shows that,the selected boron contains mainly column szaibelyite,and less impurities,especially the key Na,K content is very low.Based on the selected process mineralogy analysis of mineral raw materials,high temperature melting experiment uses the method of preparation of mineral raw materials complex situation silica conditions,which was discussed the melting temperature,melting time,the amount of the three main influencing mineral melt factors,and product characterization and composite microsilica market performance comparison.Through a lot of experiments and test data analysis,we achieved the following results and progress.1.The characteristics of mineral raw materials and the basic formula of composite silica powder?1?Through the selected physical and chemical properties of mineral raw materials analysis shows.Boron selected mainly by the column of boron and magnesium ore and impurities,and quartz sand,kaolin,bauxite,pyrophyllite and dickite minerals,which mainly contains SiO₂,Al₂O₃ occurrence of minerals,calcite and limestone containing mainly,CaO mineral occurrence.?2?Referring to the chemical composition of silica fume composite index,were mineral raw ingredients come in four formulations:1#formula?kaolin?:clay?14parts?,boron?5parts?,limestone?43parts?,quartz sand?43 parts?;2#formula?pyrophyllite?:pyrophyllite?50parts?,boron?5parts?,limestone?50parts?,quartz sand?15parts?;3#formula?dickite?:dickite?15parts?,boron?5parts?,limestone?44parts?,quartz sand?45parts?;formulation 4#?bauxite?:bauxite?6parts?,boron?5parts?,limestone?43parts?,quartz sand?46parts?.2.Preparation of composite micro silica conditions of mineral raw materials?1?Preparation of mineral raw materials complex micro silica melting experiments,obtained with quartz sand,limestone,borax,kaolin mineral raw materials 1#recipe?kaolin?,prepared composite micro silica process parameters:Melt temperature:1500?,melting time:2h,boron:5parts;2#formula?pyrophyllite?Melting temperature:1500?,melting time:2h,boron dosage:5parts;3#formula?dickite?melting temperature:1500?,melting time:2h,boron dosage:5parts;4#formula?bauxite?Melting temperature:1550?,melting time:2h,boron dosage:5parts.?2?By melting the observing,composite silica powder of mineral raw materials are melted as the temperature increases,starting in the middle and then spread to the surrounding melt began,due to the inherent impurities and Fe element contained in mineral raw materials,thereby melting pale green sample;the same time as the hydrated compound component contained in the molten volatile decomposition,resulting in molten material has a certain ignition loss rate.3.Structure and characterization of the composite silicon powder composition?1?Preparation of mineral raw materials complex Silica Properties:a molten-type amorphous material.SiO₂ content of which is greatly reduced,about 55%of the total share,and Fe,Na,K few impurities.Chemical composition to meet the requirements of market indicators?2?By aqueous extracts were analyzed and characterized drawn:the resulting composite micro silica conductivity,Na⁺,K⁺,Cl^-ion concentration is less than the market value of the production of composite silica powder sample,and reached the composite silicon powder market index requirements.Obtained by micro-hardness is greatly reduced,micro-Vickers hardness is maintained at less than 1100-1200.