Research On Construction Quality Control Of Integrated Circuit Cleanroom

In recent years,with the rapid development of the integrated circuit industry,the scale of the cleanroom construction has also increased by leaps and bounds,accompanied by quality issues that cannot be ignored in its construction process.Different from traditional architectural engineering,in addition to the characteristics of huge construction investment,short construction period,and complicated construction,the requirements of cleaning,seal,and precision control during the construction process are rarely involved in traditional one.There are special gases and chemicals with flammability,hypertoxicity and radioactivity,which caused the high challenge of the quality control and the huge economic loss and safety hazards during construction.Therefore,on the basis of the traditional quality management theory,combined with the characteristics of its construction,it is of great significance to study the quality control of cleanroom construction.Firstly,this paper introduces the rapid development of the integrated circuit industry and the cleanroom construction,and puts forward the importance of quality control of cleanroom construction by combining its characteristics.Through the literature investigation,the relevant theories of quality management are sorted out,and the total quality management theory and zero defect theory are mainly introduced.Then,the concept of cleanroom is introduced,and its characteristics of clean engineering,such as high cost,short construction period,high requirements,high altitude operations,large area precision control,and full process clean control are summarized and analyzed.Combined with the characteristics of cleanroom construction and quality management methods,the clean engineering after the completion of civil engineering is studied from the "three phases" and "five elements" control.The three phases are the general clean phase,the very clean phase,and the super clean phase,and the quality and construction requirements of clean control at different stages are different.The five elements are human,machine,material,method,and environment.There are cleanliness requirements on personnel composition and personnel management,material and equipment selection and management,construction organization design,environmental control and management.Typically,all elements need to be non-dust-producing or to avoid dust-producing as much as possible.Finally,combined with actual cases,the quality control methods in the clean phase are applied.Through strict implementation and continuous improvement of the quality control methods in the implementation process,a good implementation effect is finally achieved,and the indicators of project cleanliness,temperature,humidity,and tightness all meet the requirements.