Research On Key Technologies Of Excimer Laser For Micromachining

Laser micromachining technology is a new application field of excimer laser technology.The wavelength of excimer laser is in the ultraviolet and deep ultraviolet bands,and has the characteristics of large single photon energy and short wavelength.Compared to the common visible and infrared lasers,excimer lasers have unique advantages in the micromachining of semiconductor materials,brittle materials,and polymer materials.At present,domestic research is mainly focused on exploring the effects of different laser parameters on material micromachining,and less research on excimer laser micromachining systems.Laser micromachining technology first requires high laser energy stability and good beam quality.Due to the discharge pumping method of excimer lasers,the output laser energy stability and beam quality are affected by the performance of the highvoltage capacitor charging power supply system.Currently,there is little research on the application of high-voltage capacitor charging power supply systems for compact excimer lasers.This thesis innovatively researches a compact high-voltage capacitor charging power supply system suitable for compact excimer lasers working in pulse applications and a Power Factor Correction(PFC)circuit system suitable for power supply in pulse applications.Power supply achieves an accurate output range of 10 k V?21 k V,a charging accuracy of ±1%,and a corrected power factor of 98%,which significantly improves the excimer laser energy stability and energy transfer efficiency,and meets the demands of micromachining applications.The laser directly output from the excimer laser is unsuitable for use as a micromachining light source in terms of spot size and energy uniformity.There are few studies on excimer laser micromachining optical path systems based on ultraviolet and deep ultraviolet bands in China.In this thesis,an innovative design of excimer laser micromachining optical path systems based on ultraviolet and deep ultraviolet bands,based on optical imaging technology,overcomes the excimer laser difficulties in transmission and fine-grained area control.Obtain a minimum laser spot diameter of 50 ?m and the range of 50 ?m ? 100 ?m is accurately adjustable.The spot shape,energy uniformity and edge characteristics are good.The performance of the micromachining optical system is stable and meets the needs of micromachining applications.Finally,this thesis builds a complete set of 193 nm excimer laser micromachining experimental platform,combined with the host computer control software,to achieve stable operation and good control of the system.Relevant micromachining experiments were carried out on resin lenses,and the effects of laser repetition frequency,energy density,pulse number and other parameters on the micromachining process and effects of resin lenses were explored.The theoretical research and engineering application of the alignment molecular laser in the field of micromachining have certain reference value.