Research On Control And Data Acquisition Technology Of Excimer Laser Micro-area Ablation Analysis System

Laser ablation refers to the process of illuminating the substrate after focusing the laser beam,the substrate material absorbs the laser energy to evaporate or convert into plasma,and realizes the process of removing part of the material from the solid surface.The laser ablation effect is directly related to many factors such as laser energy density,wavelength,beam quality,and optical performance of the material itself.Due to the short wavelength of the excimer laser and the high single-photon energy,the laser ablation using the excimer laser as the light source can achieve a higher resolution micro-ablation effect.At the same time,because most materials have better energy absorption for ultraviolet light sources,excimer laser ablation greatly reduces the thermal damage of the material and improves the laser ablation efficiency.The laser ablation system can be widely used in the field of detection and analysis,but the structure of the analysis system is often more complicated.The linkage control between different hardware and data transmission technology directly determine the analysis performance and system stability of the system.In recent years,the demand for high-speed analysis of large samples in various fields has become stronger,and the high-speed analysis scenario involves a huge amount of data and high-speed device linkage.Therefore,control and data acquisition technology has become one of the bottlenecks of related system research and development.In response to the above problems,this study uses an ArF excimer laser with a wavelength of 193 nm as a light source to build an excimer laser micro-area ablation system that integrates micro-area imaging functions.For the detection and analysis of laser ablation system,the key technologies of equipment linkage control and data acquisition were researched.And based on the research results,a high-performance excimer laser induced breakdown spectroscopy(LIBS)element imaging system and excimer laser ablation inductive coupling Plasma Mass Spectrometry System(LA-ICP-MS).The main research contents of this article include:(1)The basic principle of excimer laser micro-domain ablation was analyzed,and the important application of the excimer laser micro-area ablation system in the field of detection and analysis was introduced.(2)The equipment linkage control and data collection technology in the excimer laser micro-area ablation analysis system were mainly studied,and the implementation process was analyzed in detail.(3)Based on the 193 nm ArF excimer laser,an excimer laser induced breakdown spectrum element imaging system and an excimer laser ablation inductively coupled plasma mass spectrometry analysis system were developed.(4)The overall equipment linkage control test and data acquisition and processing performance analysis were carried out,for the excimer LIBS element imaging system and excimer LA-ICP-MS analysis system.Through the testing and analysis of the system functions,the LIBS element imaging system and the LA-ICP-MS analysis system with complete functions,good stability and high automation are finally realized.Among them,the LIBS element imaging system in high-speed mode is the first domestic implementation of a megapixel-level element distribution map at a 50Hz acquisition frequency,which provides a good solution for the surface element analysis of large samples,and has a very good application prospect.At the same time,the research of precise control and data acquisition technology and the research of two sets of analysis systems have also laid the foundation for the further research of domestic related analytical instruments.