Research On High Voltage Soft Start And Filament Control For The RF Power Supply Of High Power Laser

High power RF slab CO₂ laser is the main force in laser processing and manufacturing industry.Stable power supply is of great significance to the normal operation of the laser.The purpose of this thesis is to study the RF power characteristics of high-power RF slab CO₂ laser,and to design a stable power supply which can be used for high power electronic tube.Main contents include:?1?The anode high voltage RF power supply principle has been analyzed to design a stable anode high voltage circuit.This anode high voltage circuit was mainly composed by a linear filter circuit,boost circuit and rectifier circuit.Before boosting,the soft start system should be loaded.through the soft start device to control the boost slowly,the electronic tube could be safely started to prevent damage caused by electronic tubes,The start time of soft start system was analyzed to prepare for the following design.The11kV DC voltage for the tube plate to provide a stable voltage input could be supplied by the boost circuit,filter circuit,rectifier circuit,and the three-phase power frequency voltage shaping.?2?The soft start system has been designed which is the most important part of the DC high voltage circuit.The impact of the electronic tube,the peripheral circuit,and the damage to the components were avoided by the high voltage circuit.The design of the soft start system was composed by the design of thyristor voltage regulation,trigger angle control and regulation design,the design of synchronous signal detection,the design of trigger pulse and isolation amplifier,and the measurement of feedback.?3?the experiment of the soft start system,has been done,and the voltage and current of the feedback circuit has been completed.The experimental data has been analyzed.The alarm circuit has been designed,and the possible faults in the circuit was processed.The problems reflected in the experiment were improved and the whole design was improved.?4?The high precision filament voltage stabilizing system has been designed.The principle of the effective voltage regulator of the electronic tube filament has been studied,and the filament cathode voltage stabilizing circuit has been designed.Through the secondary load voltage stabilizing circuit of the filament transformer,the controllable silicon control signal was adjusted to obtain the 0³80V AC output.Control signal was generated by the given signal of proportional integral circuit.the output control signal was the same as the given signal.The control signal could be adjusted by controlling the given signal.The voltage regulator board was also loaded with an electronic tube adapter circuit,which could quickly adapt to different types of electronic tubes.The content of this paper could improve the stability of high power RF power supply,which was of great significance for the high power and high beam quality output of RF slab CO₂ laser.