Research And Experiment On Technology Of Performance Improvement On Silicon Micromachined Gyroscope

Silicon micro-gyroscope is one of the important applications of MEMS technology in inertial navigation,with the advantages of small size,light weight,low cost,mass production,easy integration,it has wide application prospect in military and civilian fields.In order to improve the overall performance of silicon micro-gyroscope,the technologies such as interface circuit,temperature compensation and bandwidth expansion are studied and analyzed in this paper.The main research contents include:(1)The research of silicon micro gyroscope interface circuit technology.The capacitance detection principle of the ring diode capacitance detection circuit is analyzed in detail,and the gain formula is deduced.The specific characteristics of the diode capacitance detection circuit are systematically analyzed,and the error of the nonideal factor of the diode is analyzed.The optimization method of the interface circuit of silicon micro gyroscope based on ring diode capacitance detection circuit is given in combination with theoretical analysis and experimental results.(2)Research and experiment on temperature compensation technology of silicon micro gyroscope based on BP neural network.The influence of temperature on the mechanical structure and the measurement and control circuit of silicon micro-gyroscope is analyzed.The influence of temperature on the zero bias output of silicon micro-gyroscope is the result of the combination of various factors.The zero bias temperature compensation model of the neural network is established,and the corresponding temperature compensation model is established based on the zero bias test data of the silicon micro-gyroscope.Based on the FPGA,the temperature compensation model is designed and implemented.Experiments show that the temperature compensation model based on BP neural network can effectively improve the temperature performance of silicon micro gyroscope.(3)Research on bandwidth expansion technology of open-loop detection of silicon micro-gyroscope.The open-loop detection model of silicon micro gyroscope is established,and the transfer function of open-loop detection model is deduced.The accuracy of open-loop detection model is verified by Matlab simulation and open-loop test.On the basis of analyzing the amplitude-frequency characteristic of transfer function,the open-loop bandwidth expansion method of silicon micro-gyroscope based on amplitude-frequency characteristic correction is proposed.The open-loop bandwidth expansion of silicon micro-gyroscope is designed and implemented based on FPGA,and the effectiveness of its bandwidth expansion is tested.The test results show that the open-loop amplitude modulation characteristic of the open-loop amplitude-frequency characteristic is extended to improve the dynamic performance of the silicon micro-gyroscope.(4)The performance test of silicon micro-gyroscope machine.According to the test rules of domestic micro mechanical gyroscope,the improved silicon micro-gyroscope was tested.The test results show that the research of this paper can improve the static and dynamic performance of silicon micro gyroscope,which is mainly reflected in:the improvement of the temperature index between the normal temperature and the full temperature range,the improvement of the scale factor linearity and the improvement of the silicon micro-gyroscope measurement bandwidth.