Research On Compensation Method Of Temperature Characteristics And Nonlinear For Wheel Silicon Micro Angular Vibratory Gyroscope

Silicon micromachined gyroscope with many advantages such as light weight, small volume, low cost, mass production and high reliability, has been widely used in the fields of automotive electronics, consumer electronics, navigation guidance and aerospace, especially the wheel angular vibratory gyroscope which has the advantage of anti overload, has been a hot research topic in recent years. For the silicon micro gyroscope, due to nonlinear problems caused by manufacturing and temperature sensitivity of material, will lead to a decline in the output performance of accuracy and stability, so carrying out the study of nonlinear problems and temperature characteristics for silicon micro gyroscope has important significance to the application and popularization of this kind of gyroscope.Based on the study of structure and working principle for wheel silicon micro gyroscope, this paper analyzes the effect of the influence of temperature on the performance, as well as nonlinear problems caused by manufacturing, and comprehensive analyzes its equivalent electrical model. Structure error is mainly caused by the process, which will cause the nonlinear error and quadrature error. With the change of temperature, the resonant frequency and quality factor of silicon micro gyroscope will change, and then affect the scale factor and bias. In order to make the influence of temperature and nonlinear problems reduce to the minimum, a compensation system of temperature and nonlinear is designed to carry out realtime compensation of its output performance.Based on the result of compensation research above, the results verified is carried out through the full time two-dimensional turntable test system. After the temperature and nonlinear compensation, the temperature coefficients of the scale factor and the fulltemperature zero bias stability is decreased from 344 ppm/℃ and 441°/h to 12.6 ppm/℃ and 40.6°/h respectively, and the nonlinearity is decreased from 2000 ppm to 100 ppm. The temperature characteristics and nonlinearity of the gyroscope is significantly improved. It has verified effectiveness and feasibility of the compensation method.