Research On Key Technologies Of Silicon Micro-gyroscope Digital Measurement And Control Based On FPGA

As a new type MEMS initial sensor, Silicon micro-gyroscope has great advantages of small volume, high reliability, easy digitization and low power etc. It has the wide application and develop prospect in the field of civil and military defense, therefore, researching on the control and measurement technology has significant meanings for improving the accuracy of the silicon micro-gyroscope.In order to overcome the shortcomings of the traditional signal processing circuit, such as susceptible to interference and poorly flexible. This paper concentrates on the key technology of the digital control and measurement system for the gyroscope based on FPGA. This dissertation mainly included:First, the dynamic equations for the drive mode and sense mode are deduced combined with the basic structure and principles of the silicon micro-gyroscope. The theories of electrostatic actuation are discussed, laying the foundation for the design of digital control and measurement system.Second, the closed-loop drive and closed-loop sense system of the silicon micro-gyroscope is built based on the theories in character 2. Building the Simulink model, by researching on the control of frequency and amplitude by the PLL and AGC respectively. In addition, introducing the theories of open-loop sense and closed-loop based on quadrature correction.Third, on the basis of theoretical analysis. The hardware of the digital signal processing circuit is implemented in a FPGA chip with the high performance AD and DA converter, which including the key algorithm like digital voltage controlled oscillator, PI controller, IIR filter and the temperature compensation.Forth, all of the circuit modules are debugged and the performance of silicon micro-gyroscope is tested. The temperature compensation of scale factor and bias are carried out in the conditions of variable temperature. Compared with uncompensated, the performance of silicon micro-gyroscope has been improved significantly. The tests verify the correctness of the circuit designed in this paper, which builds a favorable base for the further research and application.