Research On Closed-loop Detection Technology Of Silicon Micro Gyroscope

With the in-depth study of micro-electromechanical systems(MEMS)and measurement and control technology,silicon micro-gyros have become the direction of extensive research in recent years.Because of their many advantages,they have been paid special attention and are widely used in the military and civilian fields.However,due to the limitation of processing technology and application environment,the accuracy and stability of silicon micro gyroscope are low.In order to meet the application requirements of relatively high precision and complex environments,improving the performance of silicon microgyroscopes has become one of the main research directions.This article takes silicon micro gyroscope as the object,with the purpose of improving its performance,has conducted in-depth research and analysis on Sigma-Delta ADC design,quadrature error correction system and closed loop detection system,etc.Micro gyroscope closed-loop detection and quadrature error correction system,and tested the key parameters of the gyroscope,the main research work of this article is as follows:(1)Sigma-Delta ADC design and simulation.Firstly,the design index of the modulator is given.After comprehensive analysis,the modulator order and key parameters are selected.Then,the simulation model of the modulator is built according to the index and parameters.Then,in conjunction with the design of the modulator,a digital filter model was established to design the overall system architecture.Finally,a complete system simulation was carried out on the premise of ensuring system stability.The simulation results show that the performance of themodulator meets the design specifications and is feasible.(2)Design and analysis of closed loop detection system.Based on the closed-loop detection principle,a closed-loop system model is constructed,and the Coriolis signal is used to form a control feedback force to suppress the Coriolis force,thereby balancing the in-phase error components of the detection mode Coriolis output.The synchronous integral demodulation algorithm is improved,the detection accuracy of the gyro is improved,the static and dynamic performance of the closed-loop detection model is analyzed,and the system simulation is performed.The results show that the closed-loop system performs well within the range.Compared with before loop optimization,closed-loop detection effectively suppresses the Coriolis in-phase error component and improves the gyroscope performance index.(3)Research and design of orthogonal error correction system.According to the root of the quadrature error,an implementation method of orthogonal force correction is proposed,which uses feedback control force to balance the orthogonal force.A simulation model of the orthogonal error control system is built,and the system performance is analyzed and simulated.The results show that the system can effectively suppress the elastic coupling stiffness,cancel the orthogonal error component in the Coriolis output signal,and increase the gyro zero Partial parameters.(4)Silicon microgyroscope test and analysis.According to the micromechanical gyroscope test rules,the performance of the silicon micro-gyroscope under full-closed condition is analyzed in detail and the parameters are analyzed.The results show that after using orthogonal correction and closed-loop detection technology,the comprehensive performance index is better than open-loop detection,and the bias is stable Performance and other parameters have been significantly improved,improving the performance of the gyro.