The Research Of Full-size Metrology System Based On Optical-electro-mechanical For 3C Industry

In recent years,with the rapid development of industrial automation and visual inspection technology,both the image and laser measurement have been widely used in the industrial production.The non-contact measurement can accomplishes the high precision metrology that can overcomes the environment's influence.To solve the metrology issues that unitary function and low efficiency,this articles develops a metrology machine based on the image metrology technology/ line laser metrology technology/ contact metrology technology and global calibration technology that can accomplishes the full size 3D metrology.The main contents are shown as below:1)The first chapter summarizes both the contact metrology and non-contact metrology in China and abroad,and then compares the different metrology machines,finally gets the conclusions that the existing measuring machines contain the issues of single function and low efficiency,therefore develops an in-line full size measurement system which can realizes high speed and high precision is needed.2)The second chapter studies the measurement requirements,and then defines the rotating equipment structure and each related measuring station to meet the high efficiency.Firstly,this chapter researches the cameras/ lens/ image acquisition cards/ line laser sensors/ non-contact displacement sensors and linear motors.Secondly,this chapter selects the main metrology sensors.Thirdly,this chapter detail designs all the measurement stations.Finally,this chapter combines each station and accomplishes the whole hardware system's development.3)The third chapter researches all the system calibrations which including the camera calibration/ PPG calibration/ line laser precision calibration/ each measuring station's coordinate calibration.After all the calibrations,not only each measuring station's precision can been ensured but also each measuring station's coordinate are combined in the same world coordinate.4)The fourth chapter researches each dimension's metrology principle and calculate method.The camera measures the 2D dimensions,the contact displacement sensor measures the 2.5D dimensions,the line laser measures the 3D dimensions that contain the step height/ profile and flatness.This chapter also studies all the dimensions' actual calculate methods and the algorithms of filtering/ edge detection/ least square/ points cloud calculation.5)The fifth chapter is focus on the GRR(repeatability and reproducibility)and correlation test,all the test results just compare with the evaluation rules,and finally the results show that the in-line measurement system can meet the measurement requirements very well.