| In the21st century which information technology develop rapidly, sensing technology has become one of the three pillars of information industry, together with computer technology and communication technology. Driven by the "Smarter Planet" concept which IBM proposes, the development and application of sensing technology will be more increasingly widespread. Meanwhile, the performance of the biosensor should be higher. So, sensors with high efficiency, low cost and high sensitivity will have vast potential for future development.This paper aims to study an optical waveguide sensor with two cascaded mirco-rings which is high-sensitivity, low-cost on silicon oxynitride (SiON) waveguide.On the basis of optical waveguide sensor based on two cascaded ring resonators employing the Vernier Effect which is proposed by our laboratory first, we use SiON waveguide to research the sensor which can work below1100nm wavelength which is silicon absorption band. The research vision of planar optical waveguide sensor transfers to the SiON material from SOI, to the visible and near infrared bands from infrared band. Furthermore, using SiON waveguide, a low-cost LED or OLED light source and silicon detectors can be integrated, greatly reduce the cost of the device.In this paper, this high sensitivity sensor on SiON has been designed, simulated and optimized using the theories of transfer matrix, beam propagation method(BPM) and finite difference time domain(FDTD), including design of the waveguide structure, sensing theory analysis using ring resonator, and detecting performance analysis based on wavelength detection and optical power detection. By optimizing the parameters the theoretical detection limit can reach2.9×10-7RIU based on optical power detection.This paper also study the production process of this sensor chip, including the research of SiON depositing growth process, the fabrication process of the entire chip and lift-off technology of the sensing window. |
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