Experimental Research On Vibration Assisted Machining Based On AFM System

Atomic force microscopy(AFM)has become an important processing tool for processing micro and nano grooves.At present,the groove can be directly described by AFM.However,this method still has some difficulties in improving the machining scale of the groove,improving machining efficiency and enhancing the controllability of groove size.The combination of the workbench and the AFM improves the processing scale only.The method of the AFM mechanical scribing based on vibration not only improves the machining scale,but also improves the processing efficiency,enhances the control of the groove size,and reduces the wear of the probe to a certain extent.In this paper,the method of the AFM mechanical scribing based on vibration is further studied,and a machining method called vibration assisted machining based on AFM system is designed on the basis of it.In the machining process,there is no movement in the horizontal plane of the probe.The vibration platform and the positioning platform provide the circular motion and uniform linear feeding motion of the sample in the horizontal plane.The vibration platform is used to provide the circumferential motion of the sample at the the certain frequency and amplitude.The positioning platform is used to provide the feed motion in the horizontal plane of the sample.The machining method is similar to that of conventional milling.In this paper,the machining process,the influence of the processing parameters on the machining results,and the wear of the probe in the machining process are studied.The following aspects are included:Firstly,the machining system is built according to the machining method.The motion characteristics of vibration platform and positioning platform in machining system are analyzed.The cutting state of the probe in the machining process is analyzed,and the influence of the parameters of the control system on the groove morphology is analyzed.Then,analysis the influence of the vibration frequency of the vibration platform,the vibration amplitude of the vibration platform,the feed speed of the positioning platform,the feeding direction of the positioning platform and the vertical load of the AFM on the surface of the sample on the the morphology of the processed groove.Finally,the wear state of the probe in the machining process is analyzed.The wear process of the probe during machining is studied,and the effect of different forces on the wear of the probe is analyzed.