Study On Silicon-Based Integrated Probe Technology And Micro/Nano Friction Effect

In this paper, three cantilever/tips with different diameters and heating function arefabricated using silicon-based microfabrication technology. Low-temperatureoxidation-sharpening process has been explored for silicon tips with tip radius from scoresof nanometers to several micrometers. With the help of Atomic Force Microscope (AFM)mode, the probes can measure force with the scale of nano-newton and can be heated inlocal tip region.Aiming at micro/nano friction and wear characteristic of PMMA polymer film, usingthe heated tip, creative researches have been made emphatically on the size andtemperature effect of friction. Glass transition (α) and secondaryβprocess in PMMA canbe detected with the heated tip from the friction in this research. Experimental resultsclearly reveal significant size effect and temperature effect on friction.With the developing of silicon-based microfabrication technology, combiningEWOD(Electro-Wetting-On-Dielectric) technology and miniature aperture probetechnology, we designed a kind of Micro/Nano liquid spotting probe.