Development Of A Machining System For Generating Three-dimensional Micro-Nano Structures Using Two-Photon Polymerization

Some functional devices that have three-dimensional micro-nano structure surface or have three-dimensional micro-nano structure element,The following a general designation for three-dimensional micro-nano structure,In many important engineering has a very attractive potential applications, mainly involves two aspects:(1) by using the three-dimen-sional micro-nano structure to make the desired interface effect of solid to solid or solid to flow,such as the guide, vice engine piston/cylinder and blades of steam turbine blades, etc;(2) by using three-dimensional micro-nano structure surface or three-dimensional micro-nano structure element to change object body’s external physical field (such as electromagnetic waves, light waves, plasma wave, force field, thermal field and magnetic field, etc) for get desired response characteristic, such as invisible, heat dissipation, compressibility, high resolution imaging, etc.Metamaterial is a artificial composite materials that have three-dimensional micro-nano structure, in order to obtain the natural material that have superior physical properties. It is generally believed that metamaterials feature sizes, that is the size of the unit cell and the distance between the adjacent cell, should be in the submicrometer or nanometer level. In order to make the three-dimensional micro-nano structure including metamaterials to make successful application in the field of engineering, the key lies in how to using the three-dimensioanal micro-nano structure in manufacture devices having large size efficientlly. Domestic and overseas scholars are generally believed that the femtosecond laser Two-Photon Polymerization (Two-Photon Polymerization, hereinafter referred to as the TPP) is a way of make real three-dimensional micro-nano structure, it is a very promising technology method, but So far there are still some problems need to be solved.To three-dimensional micro-nano structure finish processing in large size by two-photon polymerization, the current main methods is to use the large stroke workbench along the x and y (or) to finish feed movement, exposure to all the expectations of proces-ing point. This method hade the main problem is that the large stroke around translational axis x and y axis make the deflection error usually in hundreds of nanometer level or higher, how to compensate in the rapidly feed of the workbench getting the deflection error correction in haven’t seen a effective solution. Described in order to solve these problems, this paper, the author’s group proposed the following technical scheme:(1) in the workbench’s process of fast feed, the object stage that clamping specimens make three-dimensional elliptical vibration so that the femtosecond laser beam method can finish static exposure relatively to the specimen; (2) in the process of the workbench quick feed using two-dimensional vibrating mirror operation femtosecond laser beam Quick deflection, to make correction for workbench’s deflection of the error on the translational axis along the x and y axis. Described in order to implement the two technical solutions, this paper will focus on design a kind of two-photon polymerization machining three-dimensional micro-nano structure system and trajectory planning problems. Specific inclu-de the following content.Frist,finish three-dimensional micro-nano structures system overall design based on the TPP. By on the large stroke motion stage to install a device that can finish a three-dimensional elliptical vibration (due to the device that can finish three-dimensional elliptical vibration has not been made, so this paper based on the use of a three-dimension-al micro replacement for the original rational exploration.), make the processed workpiece finish the feed movement when make a three-dimensional elliptic motion relative to the bench; In light path system installing a two-dimensional galvanometer system, to make the femtosecond laser beam deflection of around x and y axis. Using CATIA three-dimension-al modeling software, modeling of the structure of the processing system design.Second,make in the process of continuous feed processing trajectory design based on the TPP. Based on successive point exposure by femtosecond laser, make design of the large stroke workbench’s and three-dimensional’s trajectory, using MATLAB software to make simulation for the design trajectory, and combining in this time period system’s femtosecond laser energy distribution to make contrast, verify the realizability of trajectory design.Finally,make statics and dynamics analysis for the TPP three-dimensional micro-nano structures machining system. Through using WORKBENCH software statics and modal analysis module, make the statics analysis and modal analysis for the motor system designed. By establishing the system designed each movement axis kinematics model, and use the MATLAB software analyzes dynamic performance of the system’s each movement axis.Through complete linear motor motion platform-piezoelectric micro series system of single input excitation response experiment, to verify the rationality in the process of building the system dynamic model.