Entablishment And Research Of A Micro Fabrication Equipment Based On The Trajectory Movement Of The Probe

Due to the small size, high integration and the speed of analysis of Micro-fluidicchip, it has shown great development potential in the fields of medicine, biology andchemistry and become an new research field of inter-discipline of mechanical, biologyand chemistry. The fabrication of Micro-fluidic chip has the focus of academicsattention. Micro-fluidic chip is composed of many micro-channel units with the verysmall dimension, and so is difficult to be processed by common methods. Currently, themethods for manufacturing the micro-channels such as micro-milling, vibration assistedmilling, photolithography technology and probe-based trajectory processing technologyhave some disadvantages, such as limited by the size of tool, serious breakage of tool,disable to manufacture complex3-D structure, limit range of machining. These allrestrict the development of the micro-fluidic chip. Thus, it is very important to built aneffective and reliable system for manufacturing micro-structure. This thesis will focuson the following three aspects to research:Firstly, a system for the micro-structure’s manufacturing was built, and the feedsystem, the fixture of probe and the force measuring device were designed. Theautomation of the moving parts was realized by using C++language. Some tests toverify the trajectory of manufactured structure using probe and the tests to verify thefeasibility of the system were conducted.Secondly, the thickness and cutting force using other’s theoretical model werecalculated and then compared with the cutting force measured by experiments. With asingle factor experiment design, the effect of cutting force to the groove’s surfaceroughness was analyzed. And the results machined by two type probes were compared.Finally, to get better control mode between the open loop and closed loop someprocess tests were performed. And then the optimal processing parameters wereobtained by the orthogonal experiment. With the best parameter settings, a square panewas machining on which some micro-structures were also processed.