Design And Simulation Of A Variable Structure Chamber In A Plasma Discharged Test Platform

The flourishing development of electronic information industry has a close interrelation of the continuous improvement of the technique about integrated circuit equipment design and manufacture.A number of IC equipment has processing chambers as one part of them.But the optimization of-the chamber structure was rare and the optimizations always focus on a signal structure which made the cost expensive.In this paper,a variable structure chamber was designed and its processing technical was analyzed as well.The feature of gas flow in chamber was simulated by numerical method.At last,the influence of those characteristics was researched by orthogonal design,which was used for chamber optimization.The research work has been done in this thesis includes the following aspects:1.A variable structure chamber was designed after its parts were analyzed.Different chambers could be obtained when the inlet mass flow.susceptor height? liner diameter and outlet section were varied.And the strengths of some important parts about chambers were calculated.2.Processing technology and test system were researched.As the vacuum chamber is a typical device to process,therefore,its characteristics were researched to design technological regulation for it.Because the air impermeability of the chamber is also a key role,so the material of chamber?processing fixtures and welding parameter which influence the air impermeability must be researched.3.The numerical model of the chamber was built.Those physical parameters and essential hypothesis would be used in simulation were analyzed and ascertained.Those boundary conditions which would influence the simulation results include inlet condition,outlet condition and wall conditions were confirmed as well.4.The flow field characteristics about every variable parameter were analyzed.Every variable parameter was chose five data and all numerical models based on these parameters were built and studied.And the pressure,velocity and temperature field of those numerical models were obtained.Through the simulation results,we got the flow field characteristics and the change law about them when those parameters varied independently.5.The sensitivity of those parameters influence on flow field characteristics was analyzed by orthogonal table method.The orthogonal table was composed of those variable parameters every of which included three levels.At last,the important order of those factors was gained through the numerical simulation results about all tests in orthogonal table.