Research Of Data Acquisition And Analysis System On Silicon MEMS Accelerometer

Silicon MEMS accelerometer has become the domestic and foreign research hot spots because of the advantages of high performance,low power and others now.It is necessary to evaluate the performance of the accelerometers due to the widespread use.This paper designs an acquisition and measurement system relying on the MEMS accelerometer produced by a research.The paper introduces the total design of the accelerometer test system,and the choice of part hardware,the software module,the design of flow chart.The software system mainly designed by MFC,in this paper,a number of performance of the accelerometer were studied,such as 1g stability,bias value,bias stability and repeatability,scale factor,scale stability and repeatability,bias temperature sensitivity,scale factor temperature sensitivity,bias temperature asymmetry and so on.And at the same time,the paper introduces the performance indicators and detailed test methods of the accelerometer.The high precision data acquisition card can help us complete the data of the measured accelerometer.In the data analysis,the test performances of the accelerometer are improved through optimization algorithm,least squares method and shift averaging method.Through the analysis and experiment,we can know a range of performances result of the accelerometer,for example,the scale factor of the 100 g accelerometer is 21.5 mv per gravity,the scale stability is 1211 ppm,which 80% higher than the traditional method result,the scale factor repeatability is 1365 ppm,85 higher than the traditional method result.The sensitivity of the scale factor is 3832.75 ppm,bias is 0.165766 g,the bias stability is 6.608970 mg,which the stability is improved by one order of magnitude,the repeatability is 2.086562 mg,the sensitivity of the bias temperature is 105 ?g per degrees celsius,the symmetry is 11.8 mg,1g stability is 6.76 mg.