Micro-system Of G-FET Device Development And Its Key Technology

GFET(Graphene Field Effect Transistor)with its ultra-high conductivity and very small device size is expected to write the myth of Moore's Law,Becoming a new generation of semiconductor devices.The GFET's core nanomaterials,graphene's high-quality,large-size preparation is the basis and premise of studying the performance and application of micro-nano devices.The combination of traditional CVD and MEMS technology has the advantages of low cost,high efficiency and repeatability,which greatly promoted the improvement of nanometer material preparation scheme and its application development.In this paper,the structural characteristics and preparation process of GFET are introduced,and the characteristics,transfer technology,process goal of graphene are described.And then from the ?CVD system of the three key technologies,structural design,temperature measurement and control and microscopic imaging discussed.The main work and technical innovation of this thesis are as follows:(1)Based on the theoretical model analysis of ?CVD system,the 3D structure of?CVD chip was drawn by using SolidWorks 2014,and the structure of the ?CVD chip was introduced into ANSYS software to simulate the structure,thermal and electric multi-physics coupling.Ensuring the temperature uniformity of the reaction platform.(2)The non-contact infrared probe is used to design the temperature detection of?CVD system.The STM32 micro controller and fuzzy PID control are used to realize the rapid response of temperature and stable output.After setting up the temperature measurement and control hardware and software platform,the experiment proves that the high temperature detection and control can be realized effectively.(3)The 14-million pixels CMOS CGU3-1400C camera was used for secondary development,and an optimized auto focus algorithm was proposed,and the focusing curve was simulated with MATLAB.The ?CVD system micro-imaging software is designed to realize the image acquisition,processing and splicing fusion of graphene growth in ?CVD system.This paper also design the entire ?CVD system's platform construction,equipment selection,gas transmission program,cavity structure.