The Testing System For The Performance Of MEMS Micromirrror

The micro-electro-mechanical system which is the integration of mechanical, optical,electrical, magnetic technology by micro-nano processing technology have been currentresearch focuses in recent decades. It has been widely used in aerospace, biomedical,micro-probe and environmental monitoring field. MOEMS which is generated by opticaltechnology and MEMS technology is the important branch of MEMS technology. OpticalMEMS sensor plays the roles of information acquisition, information processing andinformation to perform in MOMES. Therefore the study of the characteristics of the opticalMEMS sensors has a certain significance for engineering applications.This article is mainly for optical MEMS sensor in form of electro-thermal driveMEMS micromirror performance test system study. This drive mode the micro-mirrorcompared to the other drive mode micromirror having a smaller driving voltage, the largerscan range, etc. This kind micromirror has shown great applications in optical coherencetomography, microscopy and micro-investment equipment. First of all, the domestic andforeign research background and development of the form of electro-thermal drive MEMSmicromirror. Then we make mechanical analysis for the double S structure of MEMSmicromirror and analyze the method of temperature compensation. Finally, we propose acombination of performance testing program based on Labview software platform,embedded technology, optical detection technology.The design of testing system consists of software design and hardware design. Thehardware of testing system includes the micro-processor STM32F103VET6, the drivermodule, the filtering module, the amplification module, photo-electric position detectionmodule, data acquisition module and communication module. The software of testingsystem includes embedded software and human-computer interaction software, embeddedsoftware is MDK4.0integrated development environment. Human-computer interaction software uses virtual instrument testing technology which takes full advantage of thepowerful data analysis capabilities of LabVIEW software. Human-computer interactionsoftware can realize the automatic data acquisition, data analysis, data processing and datapreservation.Finally, the application of the testing system can measure the performances of MEMSmicromirror such as the relationship of drive voltage and deflection angle, the frequencyresponse characteristic, the performance parameters of the resistance characteristic.