Design And Characterization Of A MEMS Temperature Sensor For Rapid Dynamic Temperature Measurement

For some rapid,severe temperature changes within a certain time,such as automobile engine ignition moment,compressor piston temperature gas compression process,the internal combustion engine piston combustion chamber wall and rocket tail nozzle wall and places of these needs rapid temperature measurement.Based on the relevant technology of rapid response to the temperature sensor,this paper proposed a two-stage micro-bridge structure of Pt thin film temperature sensor,which based on MEMS technology.The sensor performances,including structure design,material selection,preparation technology,finite element simulation and the simulation data analysis are studied.Its main contents are as follows:1.A MEMS temperature sensor of the mechanism that two-stage micro-bridge is Designed,which used Pt/SiO2/Si,as the temperature of heat,heat insulating material and base material in turn,and the micro machining process is list.2.Using the finite element analysis software of ANSYS to study the temperature rise characteristics of the MEMS sensor in the field of static and dynamic.3.In the process of finite element analysis,this paper mainly studied the influence of thermal response under different thickness and length of Pt film or different thickness of SiO2 thin film.Research shows that the thinner of SiO2 thin thickness and Pt thin film thickness,the smaller the time constant.Pt film series length almost have no influence on heat loss or time constant,therefore,so we can appropriately increase the number of Pt film,that's to say,increase the thermal resistance value,to facilitate the collection of temperature signal.