Design And Key Technology Of Micro-range Field Time Grating Displacement Sensor

Nano displacement measurement technology is the basis and guiding the developmentof modern science and technology, which is a major scientific frontier, the current domesticscholars have launched the research of multinational nanometer measurement technology.Nano linear displacement sensor is the core technology and key components of modernindustry, national defense and other special needs. At present, the range of sensor hundredsmillimeter level is mainly including the grating, laser interferometer, inductive synchronoustransducer, capacitive, magnetic grid etc. But for large range nanometer measuring more thanone hundred millimetres only grating and laser interferometer can be used..Grating sensor is nanometer measurement instrument by far the most common is the useof the reticle measurement, grating displacement precision, that is to say, the resolution ofgrating precision depends entirely on the processing time line of precision instrument. Atpresent, the reticle linewidth of LIP201grating displacement sensor is manufactured byHeidenhain which the range is270mm range and the precision is achieved in t±100nm. Butaffected by the optical diffraction limit, the measurement range and accuracy of mutualconstraints reticle processing, has restricted the further development to the nano grating.Time grating sensor according to the present technology at home and abroad by thebottleneck of nanometer measurement in our country for the first to time measurement space,is a use of "reflector" instead of "grating" displacement measurement instrument. While theelectric field mode time grating sensor is electric coupling principle and micro nanoprocessing technology research and development of a new type of time grating sensor basedon. Compared with the traditional time grating the new one has the characterist ics of simplestructure and low power consumption, high processing precision, measurement. Electric fieldmode time grating is a research toward the large range nanometer measurement instrument ofa breakthrough project, we will be a sensor prototype based on design theory, to form a complete set of design ideas.In this paper, the author mainly for prototyping electric field sensor, carried on severalpoints:(1) the working principle of gate electric field sensor is briefly introduced andCOMSOL software is use to establish electric field simulation model. The analysis of thedistribution of electric field sensor, initially identified the electrode spacing, the sensordynamic fixed ruler spacing, electrode gap for the influence of the electric field distribution,the design parameters of the gate is determined;(2) The design of mask based on thesimulation results, and according to the possible problems the solutions is designed, forprocessing a large number of processing difficulty with high precision is proposed to realizesplicing technology field time grating sensor prototype.(3) For processing a prototype testingin the morphology, structure and performance testing, the initial of electric field time gratingsensor micro nanometer measurement is realized. In this paper, through the processing ofgrating sensor with large range and high precision electric field type, the large range sensorbased on high precision splicing technology of micro nano processing technology is formed,at the same time, as the displacement measurement technology of our country make certaincontribution.