Co-simulation On Constant Temperature Air Bath Temperature Field Of Ultra-stable Micro-environment System

The lithography is a key equipment of integrated circuit manufacturing.Temperature and other environmental parameter fluctuations are important factors affecting its performance.Common feedback control can only control the temperature state of a single point,and cannot directly control the temperature field.Besides,traditional simulation methods mostly use static boundaries,which cannot be integrated with real-time feedback control data.This thesis focuses on the real-time simulation technology of the temperature field of air bath system.The main research work and conclusions are as follows:According to the influence of temperature,pressure,cleanliness,which are important factors that affect the normal operation of the lithography,and based on the basic control method of temperature control,cleanliness control and uniformity control,the temperature control method with compressor refrigeration unit and electric heater in series,the cleanliness control method of multi-stage filters with positive pressure control and the local uniformity control method with air bath unit have been designed.The flow field control method of air bath system is formed from the above three control methods combined with the cascade temperature control model and algorithm.In order to solve the limitation that the traditional simulation methods cannot exchange data with real-time feedback control,a collaborative simulation method based on FLUENT UDF custom function and MATLAB S-function interface has been proposed.It has been designed in detail from three aspects: coupling mode,data exchange mechanism,architecture and process,which provides an effective means for multi-domain system simulation,and the collaborative simulation model suitable for flow field control has been established.Based on the collaborative simulation model,single-factor simulation studies and multifactor orthogonal experimental studies have been carried out respectively to explore the influence of ventilation frequency,overspreading rate and outlet position which are the major factors affecting the temperature field distribution of the chamber,revealing the variation regular of each factor on the temperature field distribution of the chamber and its significance.According to the simulation results,the optimal combination of factors for the temperature field distribution of the chamber is determined eventually.Meanwhile,the accurate simulation of temperature field distribution is realized.An experimental prototype of the micro-environment air shower system with constant temperature has been built.The consistency and feasibility of the temperature field simulation results based on the collaborative simulation method and the experimental results have been verified experimentally.The results of the experiment show that the maximum relative error of the temperature uniformity between simulation and experiment is 14.32%,and the performance of the constant temperature air bath system designed in the paper meets the requirements.