Study On Key Technology Of Design And Fabrication For Piezoelectric Multi-d Force Sensor Quartz Crystal

The Giant high-end manufacturing equipment included heavy-duty operation machine,large-scale grinding machine,shield machine,etc.All of this is the basic of manufacturing industry chain.The important manifestation is the level of sophisticated manufacturing development and national economy.With the "thirteen five plan" and "Made in China 2025" proposed to accelerate the domestic manufacturing industry,towards to the development trending of high-end and intelligent.In order to realize the real-time force feedback and force compliance control of manufacturing equipment space.It is necessary to carry on the space accurate and efficient multi-dimensional force measurement to the manufacturing equipment.Promoting the sensing technology and measurement of manufacturing equipment to become the key technology.Funded by "Study of Parallel Principle of Piezoelectric Six-Dimensional Heavy Force Sensor"(No.51205165)of the National Natural Science Foundation and the Shandong Province Natural Science natural science foundation of Shandong Province special "Piezoelectric Six Axis Heavy Sensor Structure Design and Key Technology of Test System Research"(No.ZR2015EL031).The key technology of piezoelectric multi force sensor is studied.Specific tasks include the following items:This paper introduces,based on the piezoelectric effect theory of quartz crystal,the structure design of the piezoelectric multi-dimensional force sensor.Including the design of the sensor space layout.According to the principle of force sensitive original measurement,the piezoelectric force model of piezoelectric multi-dimensional force sensor is established,and the piezoelectric multi-And the mathematical expression of the sensor is output.The crystal sequence of the sensor is designed.The shape of the crystal is simulated by the workbench software.Analyzed and calculated the quartz crystal.Second,the crystal group is the core component of the piezoelectric multi-dimensional force sensor,for which the key preparation process of the sensor crystal group through a large number of experiments to study.In cleaning,selecting the appropriate cleaning equipment,cleaning solvents,cleaning methods for the production of piezoelectric materials and the key parts of sensors and equipment for decontamination to ensure cleanliness.Drying technology,especially for the piezoelectric material drying time,drying temperature,drying method and so on have the influence on the crystal performance.The detection technology includes the insulation resistance value and the crystal axis judgment,the insulation resistance value is more than 1013?,in order to ensure the charge stable output,no charge leakage phenomenon,and the application of orthogonal experimental method,then,the optimal cleaning and drying methods are determined,analyzed the relationship between the crystal axis and the electrode surface.It is the key reference in the design and manufacture of piezoelectric multidimensional force sensor.Finally,the piezoelectric multidimensional force sensor crystal sets are developed.And the crystal set fixtures and auxiliary crystal assembly of tablet presses are designed.The fabrication process and flow of unit crystal sets and assembled crystal groups were designed.Performance calibration experiments to determine the linearity of the crystal,sensitivity,lateral interference,repeatability error indicators.From the experimental results,the crystal input and output have good linearity which verified the correctness of the key manufacturing technology.