| Sensor technology is one of the impressive and rapidly developing new technology in the world, is an important symbol of development of contemporary science and technology. Both in the field of industrial production, and in daily life, every technology are inseparable from the sensor.To design and manufacture a highly precise and stable pressure sensor, we should mainly consider in two aspects:On the one hand is the principle and structure design, involving the selection of the elastomer material and strain alloy materials, the design of the strain structure, and the process research of deposition, photolithography, and heat treatment. On the other hand is the signal disposal of the sensor probe, mainly to amplify the output signal of the sensor probe, converse the effective signal, and compensate the zero point offset, linearity, and temperature drift, and improving the performance of products. Especially, when the environmental temperature dramatically change, the measurement error is greater, so you usually need to use comprehensive compensation technology.Nowadays, the pressure sensor, making by MEMS technology, has a big enhancement in sensitivity, linearity. But due to factors such as IC manufacturing process and temperature characteristic of the device, the shortcomings of the pressure sensor, such as zero point offset, sensitivity error and temperature drift still exist. So it needs subsequent signal processing technology (compensation).In the paper, according to the theory of the signal detection and processing, we designed a system which is used for calibrating and DSP compensating the piezoresistive pressure sensor in the laboratory. The part of DSP compensation mainly used the MLX90308chips to realize the compensation of zero point offset and sensitivity and temperature drift, and it also utilized the Lab VIEW software to present and process the output signal after compensation collected by NI6211DAQ. |
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