Research On The Key Technologies Of Gyroscope Encapsulation For High Environmental Stability

Researching and developing high performance Micro-Gyro has very important significance to improve the comprehensive national strength and increase the national defense. But there still are large gaps of competitiveness in terms of engineering application. The main reason goes to the stability and reliability of the micro gyroscope can't meet the application requirements. This paper, aiming at butterfly Micro-Gyro, carried out research of Micro-Gyros impacted by the complex mechanism of the external environment surrounding and improving its environmental adaptability, mainly solved issues of hip- level closed- loop temperature control and sensitive structural vibration isolation.1?Briefly introduced the overall structure and operating principle of butterfly Gyros, the effects of Micro-Gyros under the main influence of ambient temperature changes has been studied. Relationship between its drive- frequency and temperature was theoretically analyzed. By experimental tests, the driving frequency changed 23.65 Hz and the zero-bias output value changes 2.43°/s, in the whole temperature ranges(-40?~60?).2?Micro-Gyros' equivalent vibration model was established, and the effects of shock and vibration was simulated by finite element software. Using Z-axis capacitance detection method, it's vulnerable to external vibration interference. With the ANSYS simulation, the effect of vibration on the Z-axis capacitance was given. and theoretically analyzed quantitatively the effects of vibration on the micro gyro interface capacitance of the output value.3?Micro-Gyros' chip temperature closed-loop control system was designed. Via the built- in temperature sensor inside the package, real-time temp-parameters is got. With the benefit of TEC controlled by PID methods, the temperature performance of silicon Micro-Gyro has been effectively improved. Test results s how that the micro-gyroscope bias temperature sensitivity based on the original reduced by 38%.4?Based on the law of vibration machine impact on micro- gyros, a “chair-type” damping structure was designed. By means of frequency sweeping test with Polytec Laser Doppler Vibrometer, this damping structure can effectively eliminate vibration above 930 Hz.