Desigh Of Excimer Laser Shaping System And The Researc Of Beam Transformation System Based On Laser Beam Simulation Method

Excimer laser is a laser produced by using the excimer gas as the active medium. The excimer laser is an ultraviolet wave band, and the wavelength is short, which is suitable for high precision micro machining. Because of the particularity of the discharge of the excimer laser in the excitation, the beam quality is greatly affected, the output light spot is bigger, and the energy distribution of the spot is not uniform, which affects the effect of micro machining. This paper analyzes the present situation of excimer laser micro machining methods, According to the research of the excimer laser shaping device and the focusing system, a set of cylindrical lens array shaping system and a set of collimation focusing system are designed.Based on the characteristics of excimer laser beam, the energy distribution of the laser beam with wavelength of 248 nm is analyzed. Three light source model of ZEMAX optical design software, which is used to fit the laser light source, is proposed. Respectively discussed the method and the detailed parameter setting of the light source simulated by source gaussian, source ellipse and source diode. The accuracy of the simulation is tested from two aspects: the energy distribution of the spot and the divergence angle of the beam. At the end of the simulation, the simulated light source which is consistent with the excimer laser is obtained. The simulation method provides the convenience for the design of the excimer laser optical element, and also provides reference for the simulation of other complex light sources.Analyze the research background and the basic principle of compound plastic array, based on the simulation and optimization capability of the optical software ZEMAX, the cylindrical lens array shaping device is designed according to the characteristics of the laser beam. The light path is constructed by the mixed model of sequential pattern and non sequential pattern, and the shaping effect is verified by the method of inserting the simulation light source.The theory of laser beam collimation and focusing is analyzed, and the influence of the parameters of the optical system on the focusing spot is discussed. The performance parameters of the existing classical optical structures are studied, and select double Gauss structure as the initial structure of the laser focusing lens, select Galileo telescope structure as the initial structure of the laser collimation lens. And use optical software ZEMAX to optimize the system. The results are verified by inserting the simulation light source on non sequential pattern that the designed collimation focusing lens can eliminate all kinds of aberrations, the focal spot size can be under 100?m, and the precision of the laser direct writing process is improved.