X-ray Micro-CT Application In Respect Of Laser Micromachining And Its Image Processing

The application of laser-induced microstructure has been able to achieve a simple material internal sculpture, now you can carve out a variety of color three-dimensional pattern in a transparent glass material, and also carve out some graphics which is not visible with the naked eye but can show the graphics with different colors under UV irradiation, making transparent material internal microchannel and even micro cavities have gradually become a reality. However, for the three-dimensional detection of these internal microstructures, it did not have a systematic plan and a corresponding measuring device. With the development of CT technology, especially high-resolution micro-CT generated, its applications have become increasingly widespread, now it is reported in the literature of examples of how to use CT technology to detect threedimensional morphology of a variety of small objects, micro-CT has been able to provide high-definition and high-contrast three-dimensional internal microstructure image for researchers and even for the clinical applications, for further analysis provides a guarantee.This subject belongs to a project which is need to develop a laser engraving processing with X-ray imaging detection integrated equipment. The successful development of the equipment on the one hand can be used to detect the internal threedimensional microstructures in materials, but also for the mechanism, technology research of laser engraving micromachining, as well as the dynamic process analysis within the ultrafast laser processing will have important significance.According to the research progress of the system and combined with some of the problems encountered in the development process, three parts were discussed respectively in turn from image enhancement process of the two-dimensional MicroCT images of laser engraving microchannel, X-ray micro-CT applications in respect of laser micromachining and the related mechanical design. Firstly, I obtained an optimal treatment options about image enhancement process of the two-dimensional Micro-CT images of laser engraving microchannel by using the experiment simulation software of MATLAB, and at the same time made a corresponding application software. Secondly, in order to detect the resolution of Micro-CT, the samples to be tested with lateral resolution of 5 um, the vertical resolution of 8 um was successfully produced by using the excimer laser to etch PMMA material. Thirdly, I discussed the application of X-ray micro-CT in the polyimide porous plate, researched the drilling process of excimer laser etched polyimide film and got the key factors of controlling the laser machining shape. Finally, I completed the design, fabrication and assemblage of the housing for transporting femtosecond laser and gas collection devices. While we successfully made the femtosecond laser engraving process come true in the MicroCT device.