Design And Implementation Of Semiconductor Manufacturing Equipment Information Management System

With the development of semiconductor industry and the progress of technology, with the upgrade of automation level, the type of manufacturing equipment are involved with semiconductor industry are more and more, their function are more and more. The equipment management level of semiconductor factory which mainly use automation equipment will directly impact future of factory. With the increase scale of manufacturing equipment day by day, so the level and result of operation of equipment management is involved with their production equipment will affect the efficiency of the factory. Semiconductor manufacturing equipment information management system can reduce resource depletion of equipment management and improve the efficiency of equipment and enhance competitiveness of factory in the market.This article analyzed the current status and future development of equipment management information system, and studied the current issues related to equipment management, and studied the importance and significance of equipment information management system in semiconductor factory, and introduce the development and research status of domestic and foreign various equipment management system, including the main and key concepts of equipment management and the various problems in equipment management now, and chances and challenges in the future. We base on the actual demand of a 300mm semiconductor factory to develop information management system for semiconductor manufacturing equipment, its core is base on routine equipment management to use ethernet technology, it can real time monitor the status of equipment for engineer check, and transfer running data of equipment to database, then collect the real time monitor data and alarm event log for engineer analysis. The engineer can study some lesson learn and grasp the rule by checking data, they active earlier action to reduce alarm count in processing before the faults happen, to reduce process time lose, to reduce capacity lose, to reduce economic lose of factory. In addition, engineer can control the parts of equipment maintenance by use semiconductor manufacturing equipment information management system to increase efficiency.